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Comparison Table ( English - Chinese ) VGOS V2.46STD R1.000 81 / 237 Copyright (C) 2009 Y amaha Motor Co., Ltd. All Rights Reserved. Code Code Code Code Englis h Englis h Englis h Englis h Chinese Chinese Chinese Chinese…

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Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 80 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Ea03512 WAFER TRAY CHANGER ERROR
The data order is illegal due to system error.
Please contact the agent.
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄数据󳕏序异常。
󲣌与󳇕售商󱴩󱮱。
Ea03513 WAFER TRAY CHANGER ERROR
The WT table number is illegal due to system error.
Please contact the agent.
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄 WT 工作台号󱓖异常。
󲣌与󳇕售商󱴩󱮱。
Ea03514 WAFER TRAY CHANGER ERROR
The door is open.
晶片托󱎭交󰀷器󳇮󲣄
柜󳊽敞状。
Ea03515 WAFER COMPONENT IS EMPTY
No component is available.
Component data Name
Pallet
晶片元件用完
没有可使用的元件。
元件数据 名称
料架号󱓖
Ea03516 WAFER TRAY CHANGER ERROR
Station up/down is time-out.
晶片托󱎭交󰀷器󳇮󲣄
料站上下移超󰋋。
Ea03517 WAFER TRAY CHANGER ERROR
Hook up/down is time-out.
晶片托󱎭交󰀷器󳇮󲣄
抓手上下超󰋋。
Ea03518 WAFER TRAY CHANGER ERROR
Hook open/close is time-out.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
抓手和超󰋋。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03519 WAFER TRAY CHANGER ERROR
Pallet fix pin up/down is time-out.
晶片托󱎭交󰀷器󳇮󲣄
料架固定󳅝上下超󰋋。
Ea03520 WAFER TRAY CHANGER ERROR
Ejector unit up/down is time-out.
晶片托󱎭交󰀷器󳇮󲣄
󲲎具装置上下超󰋋。
Ea03521 WAFER TRAY CHANGER ERROR
Ejector unit selection is time-out.
晶片托󱎭交󰀷器󳇮󲣄
󲲎具装置󲳞超󰋋。
Ea03522 WAFER TRAY CHANGER ERROR
Latch open/close is time-out.
晶片托󱎭交󰀷器󳇮󲣄
󳊾󳇖的和超󰋋。
Ea03523 WAFER TRAY CHANGER ERROR
Failed to return the pallet.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
退回料架失󲧺了。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03524 WAFER TRAY CHANGER ERROR
Failed to return the pallet.
晶片托󱎭交󰀷器󳇮󲣄
退回料架失󲧺了。
Ea03525 WAFER TRAY CHANGER ERROR
Failed to pull out the pallet.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
抽出料架失󲧺了。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03526 WAFER TRAY CHANGER ERROR
Failed to pull out the pallet.
晶片托󱎭交󰀷器󳇮󲣄
抽出料架失󲧺了。
Ea03527 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the hook unit is down.
Check the hook up/down sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
抓手装置下降状。
󲣌确󲡹抓手装置上下感器的状。
Ea03528 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the hook unit is closed.
Check the hook open/close sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
抓手装置󳋂状。
󲣌确󲡹抓手装置和的感器的状。
Ea03529 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the pallet fix pins are up.
Check the pallet fix pin up/down sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
料架固定󳅝上升状。
󲣌确󲡹料架固定󳅝上下感器的状。
Ea03530 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the ejector unit selection is
on neither side.
Check the ejector unit selection sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
推󳕋器装置󲳞不上不下状。
󲣌确󲡹推󳕋器󲳞感器的状。
Ea03531 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the latch is open.
Check the latch sensor.
晶片托󱎭交󰀷器󳇮󲣄
返回原点作始失󲧺了。
󳊾󳇖启状。
󲣌确󲡹󳊾󳇖感器的状。
Ea03532 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is detected
at the halfway position.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
已󰖕出料架在中途位置上。
󲣌确󲡹料架感器的状。
Ea03533 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is detected
晶片托󱎭交󰀷器󳇮󲣄
始返回原点作失󲧺了。
已󰖕出料架在安装位置上。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 81 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
at the set position.
Check the pallet sensor.
󲣌确󲡹料架感器的状。
Ea03534 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because LT axis is above LS unit.
Check the LT position.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
LS 󲱉装置上空安全感器󰖕出了 LT 󲱉。
󲣌确󲡹 LS 󲱉装置上空安全感器的状。
Ea03535 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is out of the magazine.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
料架从收󱮈柜中出并已被󰖕出。
󲣌确󲡹料架感器的状。
Ea03536 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a door is open.
Check the door sensors(2 positions)
and the door switch.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
入口敞状。
󲣌确󲡹入口敞感器(2 )和入口的状。
Ea03537 WAFER TRAY CHANGER ERROR
Unknown pallet is detected by the sensor
during pallet action.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
在退回/抽出料架的作中，󰖕出了不明料架。
󲣌确󲡹料架感器的状。
Ea03538 WAFER TRAY CHANGER ERROR
A pallet is lost by the sensor
during pallet action.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
在退回/抽出料架的作中，
没有󰖕出有的料架。
󲣌确󲡹料架感器的状。
Ea03539 WAFER TRAY CHANGER ERROR
No mark data for component outline recognition
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件外形󲢛用󰓜󲢅数据。
󲣌与󳇕售商󱴩󱮱。
Ea03540 WAFER TRAY CHANGER ERROR
No position data for component
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件位置数据。
󲣌与󳇕售商󱴩󱮱。
Ea03541 WAFER TRAY CHANGER ERROR
No component data
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件数据。
󲣌与󳇕售商󱴩󱮱。
Ea03542 WAFER TRAY CHANGER ERROR
The destination magazine column is already occupied
by another pallet.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
料架退回位置中已有其他料架存在。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03543 WAFER TRAY CHANGER ERROR
The destination magazine column is already occupied
by another pallet.
晶片托󱎭交󰀷器󳇮󲣄
料架退回位置中已有其他料架存在。
Ea03544 PLEASE CHECK...
The dump action has been done because a component
seemed left on the wafer head,
Wafer head
If there is still a component attached,
press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
󲣌󰖕󰒺。
因晶片上残留了元件，所以󲲰行了弃理。
晶片
如果元件仍吸附在晶片上，󲣌按 EMERGENCY STOP 按󳆃，
取出元件。之后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
Ea03545 PLEASE REMOVE...
It seems that a component is left on the wafer station.
Wafer station
Press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
󲣌取出元件。
晶片站上残留着元件。
晶片站
󲣌按 EMERGENCY STOP 按󳆃，取出元件。
之后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
Ea03546 WAFER TRAY CHANGER ERROR
It seems that a component is left on the wafer head
or the wafer head is plugged.
Or the wafer station is plugged.
Wafer head
The wafer head will try to dump the component.
If this error happens several times, please clean up
the wafer nozzle and, if necessary, re-adjust the
vacuum level of the wafer head.
晶片托󱎭交󰀷器󳇮󲣄
晶片上残留着元件，
或晶片已堵塞。
󲲭可能是晶片站堵塞了。
晶片
󲣌按任意󳈃行弃作。
如果此󳕎󳇮󲣄已生多次，󲣌清󰧖晶片的
吸嘴和󲣘󱽗真空󱭼。
Ea03547 WAFER TRAY CHANGER ERROR
It seems that a component is left on the wafer station
or the wafer station is plugged.
Or the wafer head is plugged.
Wafer station
晶片托󱎭交󰀷器󳇮󲣄
可能晶片站上残留着元件，或晶片站已堵塞。
也有可能是晶片堵塞了。
晶片站
󲣌按下 EMERGENCY STOP 按󳆃，󰖕󰒺晶片站。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 82 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
If this error happens without any component on the
station, please clean up the station and,
if necessary, re-adjust the vacuum level.
此后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
如没有残留元件的状下，生󲢺󳇮󲣄󰋋，
󲣌清󰧖晶片站和重新󲣘󱽗真空󱭼。
Ea03548 WAFER TRAY CHANGER ERROR
"Pallet set" action was aborted due to emergency
stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了料架作。
Ea03549 WAFER TRAY CHANGER ERROR
"Reset" action was aborted due to emergency
stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了位作。
Ea03550 WAFER TRAY CHANGER ERROR
"Component recognition" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件外形󲢛作。
Ea03551 WAFER TRAY CHANGER ERROR
"Badmark recognition" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了坏板󰓜󲢅󲢛作。
Ea03552 WAFER TRAY CHANGER ERROR
"Component pick" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件吸附作。
Ea03553 WAFER TRAY CHANGER ERROR
"Component check" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件确󲡹作。
Ea03554 WAFER TRAY CHANGER ERROR
"Component check by camera" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了用相机确󲡹元件的作。
Ea03555 WAFER TRAY CHANGER ERROR
"Component dump" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件弃作。
Ea03556 WAFER TRAY CHANGER ERROR
"Component pick by main machine" action was aborted
due to emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
由󱧼急停机等，中止了主机的元件吸附作。
Ea03557 WAFER TRAY CHANGER ERROR
"Dynamic out measurement" action was aborted
due to emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了󲱨出󲡶󰨠作。
Ea03558 WAFER TRAY CHANGER ERROR
The position is out of reach.
晶片托󱎭交󰀷器󳇮󲣄
XY 󲱉不可能到达的位置。
Ea03559 WAFER TRAY CHANGER ERROR
Failed to transfer the vision memory.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
像内存送失󲧺了。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03560 VISION SYSTEM ERROR
Recognition of BadMark for wafer component is
aborted, because vision system has some problems.
Information 1
Information 2
󲚛󲚞系󱮴异常
因󲚛󲚞系󱮴异常，所以中断了晶片元件的坏板󰓜󲢅的󰖕出。
󲢻󱮛信息 1
󲢻󱮛信息 2
󲣌将󳇮󲣄号󱓖和󲢻󱮛信息通知󱮮制造商。
Ea03561 VISION SYSTEM ERROR
Recognition of wafer component is aborted,
because vision system has some problems.
Information 1
Information 2
󲚛󲚞系󱮴异常
因󲚛󲚞系󱮴异常，所以中断了晶片元件的像的取得。
󲢻󱮛信息 1
󲢻󱮛信息 2
󲣌将󳇮󲣄号󱓖和󲢻󱮛信息通知󱮮制造商。
Ea03562 WAFER TRAY CHANGER ERROR
Component image acquisition is time-out.
晶片托󱎭交󰀷器󳇮󲣄
元件像取得超󰋋。
Ea03563 WAFER TRAY CHANGER ERROR
Component image processing is time-out.
晶片托󱎭交󰀷器󳇮󲣄
元件像理超󰋋。
Ea03564 WAFER TRAY CHANGER ERROR
Badmark image acquisition is time-out.
晶片托󱎭交󰀷器󳇮󲣄
取得坏板󰓜󲢅像超󰋋。
Ea03565 WAFER TRAY CHANGER ERROR
Badmark image processing is time-out.
晶片托󱎭交󰀷器󳇮󲣄
理坏板󰓜󲢅像超󰋋。
Ea03566 INTERRUPTION ERROR
This action was aborted due to emergency stop
or other error.
作中断󳇮󲣄
因󱧼急停机等原因而中止了作。
Ea03567 COMMAND ERROR
This command can not execute in this condition.
Please reset the machine.
指令行条件󳇮󲣄
本指令在非位状不能行。
行󰋋，󲣌位机器。
Ea03568 WAFER TRAY CHANGER ERROR
There is no wafer station to handle this component.
晶片托󱎭交󰀷器󳇮󲣄
没有可以移󲱒此元件的站点。
Ea03569 WAFER TRAY CHANGER ERROR
There is a wrong pallet on the wafer stage.
--- CAUSE ---
晶片托󱎭交󰀷器󳇮󲣄
安装在料架台的料架󱚢󱥐异常。
原因：