YAMAHA 报警资料.pdf - 第41页

Comparison Table ( English - Chinese ) VGOS V2.46STD R1.000 41 / 237 Copyright (C) 2009 Y amaha Motor Co., Ltd. All Rights Reserved. Code Code Code Code Englis h Englis h Englis h Englis h Chinese Chinese Chinese Chinese…

100%1 / 237
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 40 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Or it has made a mistake and reacted, latch may not have
carried out normal operation of whether latch sensor is out
of order.
Please check latch sensor and tray unit.
Ea00864 INTERLOCK ERROR
You can't move X ,Y ,R or W axis,
because Z axis is moving or Z axis position
safety sensor is OFF.
Please check Z axis position.
󱴩󳇖󳇮󲣄
Head 的高度在危󳌾位置上，
因而不能移 X、Y、R、W 󲱉。
Z 󲱉正在移或 Z 󲱉安全感器呈 OFF 状。
󲣌把 Head 移至安全高度。
Ea00865 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a nozzle station at the bottom.
󱴩󳇖󳇮󲣄
因吸嘴交󰀷站不在下降端，
所以 X、Y 󲱉不能移。
Ea00866 INTERLOCK ERROR
You can't move Z axis,
because X or Y axis is moving.
󱴩󳇖󳇮󲣄
因 X、Y 󲱉正在移，所以不能移 Z 󲱉。
Ea00869 <<<WARNING SENSOR ERROR>>>
Head down sensor or Lower Sensor is OFF in A-table.
Please check sensor and remove the cause of
this sensor being OFF.
If you don't remove the cause, it is impossible
to start production.
<<<警告 感器异常>>>
在 A 工作台，󰖕出了[吸嘴下降状]。
下降端感器，或第 1 下降区域感器呈 OFF 状。
󲣌󰖕󰒺感器，󰒺明故障原因并解决。
如没有解决，不能始自运行。
Ea00870 <<<WARNING SENSOR ERROR>>>
Head down sensor or Lower Sensor is OFF in B-table.
Please check sensor and remove the cause of
this sensor being OFF.
If you don't remove the cause, it is impossible
to start production.
<<<警告 感器异常>>>
在 B 工作台，󰖕出了[吸嘴下降状]。
下降端感器，或第 1 下降区域感器呈 OFF 状。
󲣌󰖕󰒺感器，󰒺明故障原因并解决。
如没有解决，不能始自运行。
Ea00871 <<<WARNING SENSOR ERROR>>>
Head up-down action is abnormal.
Following reasons are possible.
- Board fixation is not correct.
- PickHeight or MntHeight is not correct.
- The head lower-end sensor does not function.
- The head lowering valve does not function.
- The nozzle shaft is bent.
- The head did not reach the bottom within 1 sec.
<<<警告 感器异常>>>
Head 的上下作异常，可能由以下原因造成。
- 基板的固定异常。
- 吸料高度、󲨉装高度异常。
- 下降端感器异常。
- Head 下降󳋕的作异常。
- 󲱉已形。
- 在下降始后 1 秒内未能到达下降端。
Ea00872 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a special light at the bottom.
󱴩󳇖󳇮󲣄
因特殊照明装置不在下降端，
所以不能移 X、Y 󲱉。
Ea00874 INTERLOCK ERROR
You can't move W axis, because the safety sensor
on buffer conveyor is ON.
󱴩󳇖󳇮󲣄
因󱯨冲送装置上的区域感器呈 ON 状，
所以不能移 W 󲱉。
Ea00876 INTERLOCK ERROR
You can't move TrayChanger Z axis,
because Magazine Clamp condition is illegal.
Be sure to press "EMERGENCY STOP" ON and open a door.
Please check fix of Magazine and Magazine Clamp
sensor and run again.
󱴩󳇖󳇮󲣄
因托󱎭交󰀷器的收󱮈柜固的状不正确，所以无法启󲱉。
󲣌置󱧼急停机状，并打柜󳊽，然后确󲡹收󱮈柜的固定
状和收󱮈柜固感器的状。
Ea00877 INTERLOCK ERROR
There is contradiction in the output and the input
about FNC Clutch Clamp.
In this situation, R-axis can't be worked.
Please check as following:
1.Sensor about Fnc Clutch
2.Machine data [INIT MOVE] for R-axis.
󱴩󳇖󳇮󲣄
因 FNC 离合器的󲱨入、󲱨出状不正确，
所以不能移 R 󲱉。
󲣌󰖕󰒺下列󳕎目。
1．FNC 离合感器的状
2．机器数据[R 󲱉 初始移]的数
Ea00879 <<WARNING SENSOR ERROR>
NOZZLE DOWN LIMIT SENSOR CHECK ERROR
Nozzle down limit sensor is ON even when the head
reach lower-end.
The sensor condition is not correct and this may
cause big problem.
Please check the sensor and remove the cause of
this sensor keeps being ON.
TABLE
Error Detail No.
<<重大󳇮󲣄>>
第 1 下降区域感器󰖕󰒺󳇮󲣄
󲍒然下降端感器于 OFF 状，但第 1 下降区域感器仍 ON。
如在此状下󱮼󱯂自运行，有可能造成󲨉装󰀴坏等重大事故。
󲣌立即󰖕󰒺第 1 下降区域感器。
工作台号󱓖
󳇮󲣄󲢻󱮛 No.
Ea00880 <<WARNING VACUUM LEVEL ERROR>
MOUNT IO SEQUENCE VACUUM LEVEL ERROR
Vacuum level has not reached the specified level.
Please check the nozzle and valve condition.
This may cause bring-back cmp. or double mount
problem.
<<重大󳇮󲣄>>
IO 作流程󲨉装元件󰋋气󰖕󰒺󳇮󲣄
在󲨉装元件󰋋未能充分降低气。
因元件可能被回，所以󲣌立即󰖕󰒺吸嘴和󳋕等。
如在此状下󱮼󱯂自运行，可能会引起元件被
回或重󲨉装等󳋃󳕭。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 41 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Head No.
󲨉装号󱓖 号
Ea00881 INTERLOCK ERROR
You can't move N axis,
because there is some heads with INDEX nozzle.
󱴩󳇖󳇮󲣄
不能启 N 󲱉。
󲣌󰖕󰒺下列󳕎目。
1．吸嘴交󰀷站的吸嘴正安装在󲨉装上。
2．吸嘴交󰀷站的感器状不正常。
Ea00882 INTERLOCK ERROR
You can't move axis,
because digital multi camera lights were up.
Please check below.
1. Are digital multi camera lights up?
2. Are digital multi camera lights sensor good?
󱴩󳇖󳇮󲣄
因数󱓖多󲚛󲚞相机的照明正在上升，
所以不能移󲱉。
󲣌󰖕󰒺下列󳕎目。
1．数󱓖多󲚛󲚞相机照明是否在上升
2．数󱓖多󲚛󲚞相机照明的感器状是否正常
Ea00883 INTERLOCK ERROR
You can't move W axis, because the cover
on lower conveyor is open.
󱴩󳇖󳇮󲣄
因收到了下送装置机盖启的信号，
所以不能移 W 󲱉。
Ea00884 ALARM!
The lights of a wafer camera have been turned off,
because they were switched on too long.
If it is necessary, please turn it on again.
警告!
因晶片󲢛相机照明的󲲳󱯂点灯󰋋󳋉超󲲜了󲚙定的󰋋󳋉，
所以󳋂了照明。
如有必要，󲣌重新打照明。
Ea00887 INTERLOCK ERROR
You can't move X or Y axis,
because some nozzles exist in the shaft cleaning blow units.
󱴩󳇖󳇮󲣄
因吸嘴吸嘴󲱉排气站的吸嘴󰖕󰒺感器正在感，
所以 X,Y 󲱉无法移。
Ea00888 ILLEGAL NOZZLE DOWN ACTION 1
Head down action is abnormal.Following reasons are possible.
- Board fixation is not correct.
- MntHeight is not correct.
- The nozzle shaft is bent.
- The head did not reach the bottom within 1 sec.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装无法到达下降端。可能是以下原因所致。
- 基板固定异常
- 󲨉装高度异常
- 吸嘴󲱉形
- 下降始后 1 秒内没有到达下降端
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00889 ILLEGAL NOZZLE DOWN ACTION 2
Head down action is abnormal.Following reasons are possible.
- MntHeight is not correct.
- The nozzle shaft is bent.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装的下降作异常。可能由下列原因所致。
- 󲨉装高度异常
- 吸嘴󲱉形
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00890 ILLEGAL NOZZLE DOWN ACTION 3
Head down action is abnormal.Following reasons are possible.
- MntHeight is not correct.
- The nozzle shaft is bent.
- The head did not reach the blow position within 1 sec.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装无法到达排气始高度。可能是由以下原因所致。
- 󲨉装高度异常
- 吸嘴󲱉形
- 下降始后 1 秒内没有到达排气始高度
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00891 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a shaft cleaning blow unit at the bottom.
󱴩󳇖󳇮󲣄
因吸嘴󲱉排气站不在下降端，所以不能移 X、Y 󲱉。
Ea00892 Nozzle mismatch error 1
The installation nozzle and the empty situation of the nozzle station are not in
agreement.
Table
Head
Nozzle Type
The nozzle of the head may be equipped with another nozzle.
Please store the nozzle of the head in the nozzle station by hand,
and perform a nozzle change.
It is very dangerous to operate as it is. Is operation stopped?
[YES] Quit [NO] Continue
吸嘴交󰀷站不一致󳇮󲣄 1
安装的吸嘴和吸嘴站的空位不一致。
工作台号󱓖 号
Head 号󱓖 号
吸嘴󱥐型
Head 上的吸嘴可能󲣄装成其他吸嘴了。
󲣌用手将 Head 上的吸嘴放回吸嘴交󰀷站，并󲲰行吸嘴交󰀷作。
此状下󱮼󱯂生将非常危󳌾，停止操作?
[是] 停止 [否] 始
Ea00893 Nozzle mismatch error 2
The installation nozzle is in the nozzle station.
Table
Head
Nozzle Type
Please perform a nozzle change after confirming that the head
is not equipped with a nozzle.
吸嘴交󰀷站不一致󳇮󲣄 2
安装的吸嘴在吸嘴交󰀷站中。
工作台号󱓖 号
Head 号󱓖 号
吸嘴󱥐型
如确󲡹吸嘴不在 Head 上󰋋，󲣌󲲰行吸嘴交󰀷作。
如吸嘴在 Head 上󰋋，吸嘴交󰀷站上可能放着其他 Head 的吸嘴。󲣌确󲡹。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 42 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
When the head is equipped with the nozzle, the nozzle of another head
may be stored in the nozzle station.Please confirm.
It is very dangerous to operate as it is. Is operation stopped?
[YES] Quit [NO] Continue
此状下󱮼󱯂生将非常危󳌾，停止操作?
[是] 停止 [否] 始
Ea00894 Nozzle mismatch error 3
The empty situation of two or more exists in the nozzle station,
and the installation nozzle cannot be discriminated.
Table
Head
Nozzle Type
The nozzle of The nozzle station may be stored in the mistaken place.
Please confirm the installation nozzle of the head,
and store the shortage nozzle in the nozzle station by hand.
It is very dangerous to operate as it is. Is operation stopped?
[YES] Quit [NO] Continue
吸嘴交󰀷站不一致󳇮󲣄 3
吸嘴交󰀷站有多个空位存在，不能辨要安装的吸嘴。
工作台号󱓖 号
Head 号󱓖 号
吸嘴󱥐型
可能吸嘴交󰀷站的吸嘴放在了其他位置。
󲣌确󲡹 Head 上安装的吸嘴，并用手方式将吸嘴交󰀷站中不足的吸嘴
放入吸嘴交󰀷站的空位中。
此状下󱮼󱯂生将非常危󳌾，停止操作?
[是] 停止 [否] 始
Ea00895 Nozzle mismatch error
The compulsion operating was selected.
May I really begin operating?
[YES] Continue
[NO] Quit
吸嘴交󰀷站不一致󳇮󲣄
󲳞了制始。
确始操作?
[是] 始
[否] 停止
Ea00896 INTERLOCK ERROR
Nozzle detecting sensor on the shaft blow unit detects something.
Please check followings:
- Some nozzles are on the blow unit?
- The sensor detects something but nozzles?
- The sensor is broken?
Table A
󱴩󳇖󳇮󲣄
吸嘴󲱉排气装置的吸嘴󰖕󰨠感器正在感。
󲣌󰖕󰒺下列󳕎目。
- 排气装置上是否不存在吸嘴?
- 感器是否被遮盖?
- 感器是否生故障?
工作台号󱓖 A
Ea00897 INTERLOCK ERROR
Nozzle detecting sensor on the shaft blow unit detects something.
Please check followings:
- Some nozzles are on the blow unit?
- The sensor detects something but nozzles?
- The sensor is broken?
Table B
󱴩󳇖󳇮󲣄
吸嘴󲱉排气装置的吸嘴󰖕󰨠感器正在感。
󲣌󰖕󰒺下列󳕎目。
- 排气装置上是否不存在吸嘴?
- 感器是否被遮盖?
- 感器是否生故障?
工作台号󱓖 B
Ea00898 INTERLOCK ERROR
Nozzle detecting sensor on the shaft blow unit detects something.
Please check followings:
- Some nozzles are on the blow unit?
- The sensor detects something but nozzles?
- The sensor is broken?
Table C
󱴩󳇖󳇮󲣄
吸嘴󲱉排气装置的吸嘴󰖕󰨠感器正在感。
󲣌󰖕󰒺下列󳕎目。
- 排气装置上是否存在吸嘴?
- 感器是否被遮盖?
- 感器是否生故障?
工作台号󱓖 C
Ea00899 INTERLOCK ERROR
Nozzle detecting sensor on the shaft blow unit detects something.
Please check followings:
- Some nozzles are on the blow unit?
- The sensor detects something but nozzles?
- The sensor is broken?
- The setting in VmSpec is right?
[Setting]-[Installation Setting]-[Cleanng Blow Unit]
Table D
󱴩󳇖󳇮󲣄
吸嘴󲱉排气装置的吸嘴󰖕出感器正在感。
󲣌󰖕󰒺下列󳕎目。
- 排气装置上是否存在吸嘴?
- 感器是否被遮盖?
- 感器是否生故障?
- 机器󲢓置是否符合󲢺机器󲚙格?
[机器󲢓置]-[工厂󲢓置]-[吸嘴清󰧖排气装置]
工作台号󱓖 D
Ea00901 DEFINED MAXIMUM AMOUNT OF BOARDS
FOR THE UNLOADER IS REACHED:
Set the parameter [Unloader Count Max.], in the
[Board information] menu to 0 to ignore this.
下料机内的基板枚数已达到了所󲢓置枚数。
如[基板信息]内的[󳕙定下料枚数]󲢓置 0，
不󲲰行󲡶数。
Ea00902 DEFINED PRODUCTION AMOUNT OF BOARDS IS REACHED.
To continue the production, set the
[Board/Schedule] parameter to 0. When switching
the Board data, make sure that there is no Board
on the buffer conveyor.
生枚数已达到󳕙定生枚数。
如󱮼󱯂此基板的生，󲣌将生数量更改 0。
切󰀷生基板󰋋，󲣌确󲡹󱯨冲送上没有基板存在。
Ea00904 Now WARMING UP .....
Press any key to stop WARMING UP.
󱂅在正在󲲰行暖机运行。
如要停止，󲣌按[ESC]󳈃。
Ea00905 Stopped according to CONVEY OUT BOARD button.
When switching the Board data, make sure that there
is no Board on the buffer conveyor.
基板󲨉装后，按照出指令已停止了送。
切󰀷生基板󰋋，󲣌确󲡹󱯨冲送上没有
基板存在。
Ea00906 EMERGENCY STOP function is now active.
Or INTERLOCK is active.
󱧼急停机状或󱴩󳇖运行中，
不能切断󱈊源。
󲣌解除󱧼急停机和󱴩󳇖。
Ea00909 Search for origin failed
due to EMERGENCY SWITCH or SERVO ERROR.
因󱧼急停机和伺服󳇮󲣄等原因，
返回原点失󲧺了。
Ea00910 ILLEGAL TRAY DATA DURING RUNNING-1
Meaning: Illegal data during running.
Recovering: Pls. RESET RUNNING.
运行中托󱎭数据异常 1
内 容: 运行中数据生了异常。
恢方法: 󲣌󲲰行初始化理。