YAMAHA 报警资料.pdf - 第82页

Comparison Table ( English - Chinese ) VGOS V2.46STD R1.000 82 / 237 Copyright (C) 2009 Y amaha Motor Co., Ltd. All Rights Reserved. Code Code Code Code Englis h Englis h Englis h Englis h Chinese Chinese Chinese Chinese…

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Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 81 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
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at the set position.
Check the pallet sensor.
󲣌确󲡹料架感器的状。
Ea03534 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because LT axis is above LS unit.
Check the LT position.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
LS 󲱉装置上空安全感器󰖕出了 LT 󲱉。
󲣌确󲡹 LS 󲱉装置上空安全感器的状。
Ea03535 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is out of the magazine.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
料架从收󱮈柜中出并已被󰖕出。
󲣌确󲡹料架感器的状。
Ea03536 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a door is open.
Check the door sensors(2 positions)
and the door switch.
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
入口敞状。
󲣌确󲡹入口敞感器(2 )和入口的状。
Ea03537 WAFER TRAY CHANGER ERROR
Unknown pallet is detected by the sensor
during pallet action.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
在退回/抽出料架的作中，󰖕出了不明料架。
󲣌确󲡹料架感器的状。
Ea03538 WAFER TRAY CHANGER ERROR
A pallet is lost by the sensor
during pallet action.
Check the pallet sensor.
晶片托󱎭交󰀷器󳇮󲣄
在退回/抽出料架的作中，
没有󰖕出有的料架。
󲣌确󲡹料架感器的状。
Ea03539 WAFER TRAY CHANGER ERROR
No mark data for component outline recognition
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件外形󲢛用󰓜󲢅数据。
󲣌与󳇕售商󱴩󱮱。
Ea03540 WAFER TRAY CHANGER ERROR
No position data for component
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件位置数据。
󲣌与󳇕售商󱴩󱮱。
Ea03541 WAFER TRAY CHANGER ERROR
No component data
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，未能取到元件数据。
󲣌与󳇕售商󱴩󱮱。
Ea03542 WAFER TRAY CHANGER ERROR
The destination magazine column is already occupied
by another pallet.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
料架退回位置中已有其他料架存在。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03543 WAFER TRAY CHANGER ERROR
The destination magazine column is already occupied
by another pallet.
晶片托󱎭交󰀷器󳇮󲣄
料架退回位置中已有其他料架存在。
Ea03544 PLEASE CHECK...
The dump action has been done because a component
seemed left on the wafer head,
Wafer head
If there is still a component attached,
press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
󲣌󰖕󰒺。
因晶片上残留了元件，所以󲲰行了弃理。
晶片
如果元件仍吸附在晶片上，󲣌按 EMERGENCY STOP 按󳆃，
取出元件。之后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
Ea03545 PLEASE REMOVE...
It seems that a component is left on the wafer station.
Wafer station
Press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
󲣌取出元件。
晶片站上残留着元件。
晶片站
󲣌按 EMERGENCY STOP 按󳆃，取出元件。
之后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
Ea03546 WAFER TRAY CHANGER ERROR
It seems that a component is left on the wafer head
or the wafer head is plugged.
Or the wafer station is plugged.
Wafer head
The wafer head will try to dump the component.
If this error happens several times, please clean up
the wafer nozzle and, if necessary, re-adjust the
vacuum level of the wafer head.
晶片托󱎭交󰀷器󳇮󲣄
晶片上残留着元件，
或晶片已堵塞。
󲲭可能是晶片站堵塞了。
晶片
󲣌按任意󳈃行弃作。
如果此󳕎󳇮󲣄已生多次，󲣌清󰧖晶片的
吸嘴和󲣘󱽗真空󱭼。
Ea03547 WAFER TRAY CHANGER ERROR
It seems that a component is left on the wafer station
or the wafer station is plugged.
Or the wafer head is plugged.
Wafer station
晶片托󱎭交󰀷器󳇮󲣄
可能晶片站上残留着元件，或晶片站已堵塞。
也有可能是晶片堵塞了。
晶片站
󲣌按下 EMERGENCY STOP 按󳆃，󰖕󰒺晶片站。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 82 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
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Code
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Press "EMERGENCY STOP" to remove the component.
After the removal, press ready button to reactivate
servo. Then hit any key to erase this message.
If this error happens without any component on the
station, please clean up the station and,
if necessary, re-adjust the vacuum level.
此后，󲣌按 READY 按󳆃，使伺服原，
然后按任意󳈃，清除此提示。
如没有残留元件的状下，生󲢺󳇮󲣄󰋋，
󲣌清󰧖晶片站和重新󲣘󱽗真空󱭼。
Ea03548 WAFER TRAY CHANGER ERROR
"Pallet set" action was aborted due to emergency
stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了料架作。
Ea03549 WAFER TRAY CHANGER ERROR
"Reset" action was aborted due to emergency
stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了位作。
Ea03550 WAFER TRAY CHANGER ERROR
"Component recognition" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件外形󲢛作。
Ea03551 WAFER TRAY CHANGER ERROR
"Badmark recognition" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了坏板󰓜󲢅󲢛作。
Ea03552 WAFER TRAY CHANGER ERROR
"Component pick" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件吸附作。
Ea03553 WAFER TRAY CHANGER ERROR
"Component check" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件确󲡹作。
Ea03554 WAFER TRAY CHANGER ERROR
"Component check by camera" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了用相机确󲡹元件的作。
Ea03555 WAFER TRAY CHANGER ERROR
"Component dump" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了元件弃作。
Ea03556 WAFER TRAY CHANGER ERROR
"Component pick by main machine" action was aborted
due to emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
由󱧼急停机等，中止了主机的元件吸附作。
Ea03557 WAFER TRAY CHANGER ERROR
"Dynamic out measurement" action was aborted
due to emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
因󱧼急停机等，中止了󲱨出󲡶󰨠作。
Ea03558 WAFER TRAY CHANGER ERROR
The position is out of reach.
晶片托󱎭交󰀷器󳇮󲣄
XY 󲱉不可能到达的位置。
Ea03559 WAFER TRAY CHANGER ERROR
Failed to transfer the vision memory.
Mount data
Component data Name
Pallet
晶片托󱎭交󰀷器󳇮󲣄
像内存送失󲧺了。
󲨉装数据
元件数据 名称
料架号󱓖
Ea03560 VISION SYSTEM ERROR
Recognition of BadMark for wafer component is
aborted, because vision system has some problems.
Information 1
Information 2
󲚛󲚞系󱮴异常
因󲚛󲚞系󱮴异常，所以中断了晶片元件的坏板󰓜󲢅的󰖕出。
󲢻󱮛信息 1
󲢻󱮛信息 2
󲣌将󳇮󲣄号󱓖和󲢻󱮛信息通知󱮮制造商。
Ea03561 VISION SYSTEM ERROR
Recognition of wafer component is aborted,
because vision system has some problems.
Information 1
Information 2
󲚛󲚞系󱮴异常
因󲚛󲚞系󱮴异常，所以中断了晶片元件的像的取得。
󲢻󱮛信息 1
󲢻󱮛信息 2
󲣌将󳇮󲣄号󱓖和󲢻󱮛信息通知󱮮制造商。
Ea03562 WAFER TRAY CHANGER ERROR
Component image acquisition is time-out.
晶片托󱎭交󰀷器󳇮󲣄
元件像取得超󰋋。
Ea03563 WAFER TRAY CHANGER ERROR
Component image processing is time-out.
晶片托󱎭交󰀷器󳇮󲣄
元件像理超󰋋。
Ea03564 WAFER TRAY CHANGER ERROR
Badmark image acquisition is time-out.
晶片托󱎭交󰀷器󳇮󲣄
取得坏板󰓜󲢅像超󰋋。
Ea03565 WAFER TRAY CHANGER ERROR
Badmark image processing is time-out.
晶片托󱎭交󰀷器󳇮󲣄
理坏板󰓜󲢅像超󰋋。
Ea03566 INTERRUPTION ERROR
This action was aborted due to emergency stop
or other error.
作中断󳇮󲣄
因󱧼急停机等原因而中止了作。
Ea03567 COMMAND ERROR
This command can not execute in this condition.
Please reset the machine.
指令行条件󳇮󲣄
本指令在非位状不能行。
行󰋋，󲣌位机器。
Ea03568 WAFER TRAY CHANGER ERROR
There is no wafer station to handle this component.
晶片托󱎭交󰀷器󳇮󲣄
没有可以移󲱒此元件的站点。
Ea03569 WAFER TRAY CHANGER ERROR
There is a wrong pallet on the wafer stage.
--- CAUSE ---
晶片托󱎭交󰀷器󳇮󲣄
安装在料架台的料架󱚢󱥐异常。
原因：
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 83 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
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English
EnglishEnglish
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ChineseChinese
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1.The pallet is not fixed.
2.An unknown pallet type is detected.
3.The pallet type detected by sensor is different
from it of component data. (Wafer Ring Diameter)
·料架没有固定
·感器不能辨料架的󱚢󱥐
·安装的是与元件数据不同󱚢󱥐的料架
(元件数据的晶片󱂄内径与从料架辨感器
得到的󰓜准晶片󱂄内径的差在 15mm 以上)
Ea03570 WAFER TRAY CHANGER ERROR
No mark data for wafer alignment recognition
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，不能取得位置校正用󰓜󲢅数据。
󲣌与󳇕售商󱴩󱮱。
Ea03571 WAFER TRAY CHANGER ERROR
No correction data for wafer alignment
due to system error.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因系󱮴󳇮󲣄，不能取得位置校正用󱮨果数据。
󲣌与󳇕售商󱴩󱮱。
Ea03572 WAFER TRAY CHANGER ERROR
Failed to adjust the correction value
for FINE mode within limit.
晶片托󱎭交󰀷器󳇮󲣄
位置校正󰓜󲢅󲢛的 FINE 󱥐型󲢛中，
校正不能收束到󲚙定以内。
Ea03573 WAFER TRAY CHANGER ERROR
"Wafer alignment" action was aborted due to
emergency stop or other error.
晶片托󱎭交󰀷器󳇮󲣄
由󱧼急停机等，中止了晶片位置校正作。
Ea03574 WAFER TRAY CHANGER ERROR
There is no wafer ejector to handle this component.
晶片托󱎭交󰀷器󳇮󲣄
不能找到能推起󲢺元件的推󳕋器。
Ea03575 WAFER TRAY CHANGER ERROR
Failed to recognize the alignment mark.
晶片托󱎭交󰀷器󳇮󲣄
位置校正󰓜󲢅的󲢛失󲧺了。
Ea03576 WAFER TRAY CHANGER ERROR
Wafer LH axis can not move
because the wafer LZ axis is in illegal position.
Please contact the agent..
晶片托󱎭交󰀷器󳇮󲣄
因 LZ 󲱉不在安装位置上，所以不能移 WaferLH 󲱉。
󲣌向󳇕售店咨󲢷。
Ea03577 The cycle stop was not started.
Please press the button again.
未能始周期停止。
󲣌重新按一次按󳆃。
Ea03578 WAFER TRAY CHANGER ERROR
Hook arm open/clese is time-out.
Check the "WF.TRAY HOOK ARM OPEN/CLOSE" sensor.
晶片托󱎭交󰀷器󳇮󲣄
抓手臂超󰋋󳇮󲣄。
󲣌确󲡹晶片托󱎭的抓手臂感器。
Ea03579 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is detected
at the halfway position.
Check the pallet sensor "WF.TRAY STAGE CENTER PALLET 2".
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
在中途位置󰖕出了料架。
󲣌确󲡹料架台中央料架 2 感器的状。
Ea03580 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because a pallet is detected
at the halfway position.
Check the pallet sensor "WF.TRAY PALLET ENTRANCE".
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
在中途位置󰖕出了料架。
󲣌确󲡹晶片托󱎭的料架中󲱁感器的状。
Ea03581 WAFER TRAY CHANGER ERROR
Failed to start searching origin
because the pallet clamp are fix.
Check the pallet clamp sensor "WF.TRAY PALLET CLAMP BACKWORD".
晶片托󱎭交󰀷器󳇮󲣄
始返回原点的作失󲧺了。
料架固定于固定状。
󲣌确󲡹料架固定感器的状。
Ea03582 WAFER TRAY CHANGER ERROR
Pallet clamp open/clese is time-out.
Check the pallet clamp sensor "WF.TRAY PALLET CLAMP BACKWORD".
晶片托󱎭交󰀷器󳇮󲣄
料架固定/超󰋋󳇮󲣄。
󲣌确󲡹料架固定感器的状。
Ea03583 WAFER THERMAL MACS-XY ERROR
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database.
晶片󰷂校正 MACS(XY)󳇮󲣄
晶片󰷂校正 MACS 的󲢛失󲧺了。
晶片󰷂校正 MACS 是否󱷤󰤶?
参照的󰓜󲢅数据是否󳇮了?
Ea03584 WAFER THERMAL MACS-LCXY ERROR
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database.
晶片󰷂校正 MACS(LCXY)󳇮󲣄
晶片󰷂校正 MACS 的󲢛失󲧺了。
晶片󰷂校正 MACS 是否󱷤󰤶?
参照的󰓜󲢅数据是否󳇮了?
Ea03585 WAFER THERMAL MACS-XY ERROR
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database 921.
WAFER THERMAL MACS-XY ERROR___
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database 921.
Ea03586 WAFER THERMAL MACS-LT ERROR
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database 922.
WAFER THERMAL MACS-LT ERROR___
Failed to detect Wafer Thermal MACS.
Does the MACS look dirty?
or check mark data in mark database 922.
Ea03601 BOARD DATA ERROR
The "FeederType Wafer" can not be used
for component data V20 compatible mode.
Machine
Component data Name
基板程序󳇮󲣄
在元件数据 V20 兼容模式下，送料器󱥐型不能使用晶片。
机器名称
元件数据 号 名称
Ea03602 BOARD DATA ERROR
No mark is specified for the "Mark for Comp" field
基板程序󳇮󲣄
晶片元件外形󲢛用󰓜󲢅号󱓖没有󲢓置。