IPC-TM-650 EN 2022 试验方法--.pdf - 第110页

APPENDIX A A. 1 Su rfa ce Rou ghn es s S ta nda rd: I SO 2 5178 -2 Thi s ISO standard is grouped into s ix dif ferent categories and each of these values are reported in the ‘‘Height Paramet ers ’’ sec- t io n . T h e c …

NIST Certified Standards

5.5

The test settings used for measuring the metallic foil

samples

be the same as used for measuring the NIST-

certified standards.

6 Measurement Parameters and Machine setup

6.1

All measurements will be done using a saved set-up and

measurement parameters (commonly termed ‘‘a template’’) to

insure that all measurements are done using the exact same

test method. Programs and procedures for each piece of spe-

cific equipment

be saved and distributed to colleagues

across the country so all facilities are taking the exact same

measurements using the exact same test procedure. For

example, procedures for laser or white light techniques will be

different.

6.2

The equipment manufacturer should be consulted to

define the specific measurement machine template needed to

assure compliance with this measurement procedure.

6.3

The specifics of the surface measurements are listed

below.

Primary Measurement Values: Sa, Sq, Sz

• is defined as the average absolute value height in refer-

ence to the mean plane.

•

is defined as the root mean square (RMS) height in ref-

erence to the mean plane.

•

is defined as the absolute vertical distance between the

highest peak and deepest valley.

7 Measurement Results

7.1

The values for Sq, Sa and Sz will be used to quantify the

overall surface texture/topography of various metallic foils and

will be reported. These values were chosen as they provide

the most up-to-date surface measurement capabilities using a

noncontact 3-D surface measurement tool.

Height 9 mm

x 200 µm (width); centered on the xy axis

Center point of Measurement spot and Standard

Grain direction of the standard is across the width

Measurement standard minimum size 1000 µm (height)

Width 3 mm

Number

2.2.22

Subject

Noncontact Metallic Foil Surface Topography/Texture

Date

5/20

Revision

Page 2 of 5

IPC-TM-650

shall

APPENDIX A

A.1 Surface Roughness Standard: ISO 25178-2

This

ISO standard is grouped into six different categories and each

of these values are reported in the ‘‘Height Parameters’’ sec-

tion. The conventional ISO 4287:2001 was defined for

contact-type tools and does not provide as much detail as the

ISO 25178-2 standard.

A.1.1 Filter Type: Gaussian Filter

This is used for deter-

mining the mean plane in surface metrology. This is defined by

ISO 1661 and is applied to areal surface roughness measure-

ments.

A.1.2 Surface Type: S-L Surface

Defines a surface

obtained after using the L-Filter. This filter removes undula-

tions and other surface variations, allowing for the measure-

ment of only the surface topography/texture without

geometric influence.

A.1.3 S-Filter

This is chosen based on the specifications of

the objective lens used to capture the data. This filter elimi-

nates the smallest scale elements from the surface, shortest

wavelength filter. S-filter should be no smaller than the spot

size multiplied by 2.5.

A.1.4 F-Operation: Plane Correction

Chosen based on

the planar features of the surface of metallic foils.

A.1.5 L-Filter

This is chosen based on the area of the total

minimum scanned section (1000 µm X 200 µm). This filter

eliminates the largest scale elements from the surface, longest

wavelength filter. L-filter should be no larger than entire scan

length divided by 5.

A.2 Filter Selection and Filter Explanations

A.2.1

The main differentiator between the ISO 4287 and ISO

25178 is how the acquired data set is processed to maximize

the accuracy of the calculated roughness values. The old

standard used terms like λs and λc to account for the stylus

tip size and total evaluation length, which are specific towards

contact profilers. The newest standard uses filters to account

for similar features of noncontact 3-D profilers: the objective

lens used for analysis and total XYZ coverage area. Listed

below is additional detail to describe how the S-filter,

F-operation and L-filter are defined.

S-Filter:

• Commonly known as a low-pass filter.

• This filter is equivalent to λs for line roughness defined by

ISO 4287.

• Eliminates noisy data that varies based on the size of beam

spot. This will vary based on the objective lens chosen for

the analysis. (see below for explanation)

Low mag lens, larger beam spot, high

S-filter value

High mag lens, smaller beam spot, low

S-filter value

Vs.

Number

2.2.22

Subject

Noncontact Metallic Foil Surface Topography/Texture

Date

5/20

Revision

Page 3 of 5

IPC-TM-650

F-Operation

• A filter for removing surface shapes (i.e., Plane tilt, curved

surface).

• Insures that the geometry of the sample surface does not

affect the magnitude of the measured roughness value.

• Eliminates the user from having to place the sample per-

fectly flat during the scan.

L-Filter

• Commonly known as a high-pass filter.

• This filter is equivalent to λc for line roughness defined by

ISO 4287.

• Removes waviness and other nonuniform surface shapes to

extract surface roughness data (normalization filter).

A.2.2

As described in Section V, the proper filter values that

properly align with the ISO 25178 for this specific procedure

(50X objective with 0.95 NA, 200 µm X 1000 µm scanned

area) are:

• S-filter: 2 µm

• F-operation: Plane Correction

• L-filter: 0.2 mm

A.3 Sample Measurements Examples

A.3.1

Shown below are examples of what the user should

expect from a successful analysis with a 3-D measurement

tool. The first picture shows a qualitative 3-D rendering of the

metallic foil surface from a laser confocal microscope tool.

A.3.2

A laser confocal microscope, or similar noncontact

3-D surface measurement tool should be able to provide

enough resolution in both the XY and Z direction to provide an

accurate representation of the material.

A.3.3

the 3-D model is obtained, the surface will then

be quantified using the ISO 25178 Surface Roughness mod-

ule.

A.3.4

example of how the data could be outputted is

shown below. Other similar forms of data outputs would be

provided to the user by other noncontact 3-D measurement

tools.

Surface roughness

Surface waviness

Number

2.2.22

Subject

Noncontact Metallic Foil Surface Topography/Texture

Date

5/20

Revision

Page 4 of 5

IPC-TM-650

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