Smart Gui - Algorithm Training Material_rev1.pdf - 第263页

Copyright © ViT rox All Rights Reserved . Analysis Mode Blob Bright Min Size (px) 255 Dark Min Size (px) 255 Bright Defect Count 255 Dark Defect Count 255 Bright Defect Fail As: Of f Dark Defect Fail As: Of f Inspect and…

Inspect Modal Bright Threshold Dark Threshold

Inspect 1 Angle 1 30 30

Inspect 2 angle_NA 30 30

Inspect 3 angle_NA 30 30

Remarks:

1. Inspect is to find the difference between modal and current inspect ref des. If the difference is

greater than the amount set in BT or DT. The defect will be prompt.

2. Defect is prompt but AOI will not classify the detected defect as error.

3. User would need need go to analysis to classify the detect defect as error.

Inspect and Analysis (Inspect Tab)

Inspect Modal

1. Users are provided with 3 inspect column to search for ROI defects

2. If users would not use inspect column, users would just set Inspect Modal to angle_NA

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Analysis Mode Blob

Bright Min Size (px) 255

Dark Min Size (px) 255

Bright Defect Count 255

Dark Defect Count 255

Bright Defect Fail As: Off

Dark Defect Fail As: Off

Inspect and Analysis (Analysis Tab)

1. Analysis Mode: Blob is used when inspected defect is a chunk or a blob, please refer to the example

given in the slide

2. Bright Min Size (px)/ Dark Min Size (px)

a. The defect should be equal or higher than the pixel set in the tab to classify it as defect set by user.

3. Bright / Dark Defect Fail As:

a. This would prompt the defect set by users

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Analysis Mode Curve

Length Threshold (um) 255

Width Threshold (um) 255

Criteria Relationship AND/ OR

Bright Defect Count 255

Dark Defect Count 255

Bright Defect Fail As: Off

Dark Defect Fail As: Off

Inspect and Analysis (Analysis Tab)

1. Analysis Mode: Curve is used to classify or detect a scratch on surface

2. Length/ Width Threshold (micron)

a. The defect would need to have the length or width of the micron set by user to classify as defect

3. Criteria Relationship: (AND / OR) => Length (AND / OR) width to classify as defect

4. Bright/ Dark Defect Count (Same as Blob)

5. Bright/ Dark Fail As (Same as Blob)

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