2OM-1104-001.pdf - 第169页
Error ID Item Description 0214000 T able Z Interlock T able-X Axis approached interlock area. (Cause 1) The table X-axis interlock sensors (BPH056 and BPH057) are defective. (Cause 2) The operation timing is shifted from…
Error ID Item Description
0205000 Table Z Servo Driver alarm signal was detected.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
If this operation does not reset the machine to its normal condition, con-
tact our service personnel for details.
0208000 Table Z Servo Driver Over-Heat
0209000 Table Z Servo Operation was incompleted, within specified time.
(Cause 1) The driver is malfunctioning or an error has occurred during communication
with the host CPU.
(Remedy 1) Shut down the power of the machine once and power up the machine
again. After that, perform the zeroing operation.
If this operation does not reset the machine to its normal condition, the
driver may be defective. Contact our service personnel for details.
0212000 Table Z Interlock P.E.C Recog-X Axis is not at origin.
(Cause 1) The P.E.C. recognition X-axis origin photosensor (BPH351) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 13 AFU01ETRP
Error ID Item Description
0214000 Table Z Interlock Table-X Axis approached interlock area.
(Cause 1) The table X-axis interlock sensors (BPH056 and BPH057) are defective.
(Cause 2) The operation timing is shifted from the normal one.
(Remedy 1) Check how the sensors are working in “Device Check” window (submenu).
When the sensors are not working, it is required to replace the sensors
with new ones. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
0216000 Table Z Interlock (+) Limit error has been detected.
(Cause 1) The table θ−axis limit (+) photosensor (BPH212) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) The table Z axis was activated while the table θ axis was moving wildly.
(during the manual operation)
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 3) Perform the zeroing operation and re-start the operation.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 14 AFU01ETRP
Error ID Item Description
0217000 Table Z Interlock (-) Limit error has been detected.
(Cause 1) The table θ limit (-) photosensor (BPH213) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) When this error occurs during a manual operation, it is not regarded as a
device error.
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut off the power to the machine once and power up the machine again.
After that, re-start the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 3) Perform the zeroing operation and re-start the operation.
0218000 Table Z Interlock P.E.C Recog-Y Axis is not at safety area.
(Cause 1) The P.E.C. recognition Y-axis interlock sensor (BPH046) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) The table Z axis was activated when the P.E.C. recognition Y-axis was not
located at its rear escape position.
(during the manual operation)
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 3) Perform the zeroing operation and re-start the operation.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 15 AFU01ETRP