2OM-1104-001.pdf - 第174页
Error ID Item Description 0313000 T able θ θ θ θ θ Interlock T able-Z Axis is not at safety area. (Cause 1) The table Z axis interlock sensor (BPH055) is defective. (Cause 2) The operation timing is shifted from the norm…
Error ID Item Description
0309000 Table
θθ
θθ
θ Servo Operation was incompleted, within specified time.
(Cause 1) The driver is malfunctioning or an error has occurred during communication
with the host CPU.
(Remedy 1) Shut down the power of the machine once and power up the machine
again. After that, perform the zeroing operation.
If this operation does not reset the machine to its normal condition, the
driver may be defective. Contact our service personnel for details.
0311000 Table
θθ
θθ
θ Interlock Table-X Axis interlock signal is OFF.
(Cause 1) The table X-axis interlock sensors (BPH056 and BPH057) are defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) The table θ axis was activated while the table X axis was brought close to
the right or the left.
(during the manual operation)
(Remedy 1) Check how the sensors are working in “Device Check” window (submenu).
When the sensors are not working, it is required to replace the sensors
with new ones. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 3) Perform the zeroing operation and re-start the operation.
0312000 Table
θθ
θθ
θ Interlock P.C.B. stopper was down.
(Cause 1) The P.C.B. stopper upper limit sensor (BPS070) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) The table θ axis was activated after the P.C.B. stopper had moved down.
(during the manual operation)
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation. When the same error still occurs,
contact our service personnel for details.
(Remedy 3) Perform the zeroing operation and re-start the operation.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 18 AFU01ETRP
Error ID Item Description
0313000 Table
θθ
θθ
θ Interlock Table-Z Axis is not at safety area.
(Cause 1) The table Z axis interlock sensor (BPH055) is defective.
(Cause 2) The operation timing is shifted from the normal one.
(Cause 3) The table θ axis was activated after the table Z axis had moved up.
(during the manual operation)
(Remedy 1) Check how the sensor is working in “Device Check” window (submenu).
When the sensor is not working, it is required to replace the sensor with
a new one. Contact our service personnel for details.
(Remedy 2) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 3) Perform the zeroing operation and re-start the operation.
0314000 Table
θθ
θθ
θ Interlock P.C.B. warpage protection was down.
(Cause 1) The operation timing is shifted from the normal one.
(Cause 2) The table θ axis was activated after the P.C.B. warpage protection had moved
down.
(during the manual operation)
(Remedy 1) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
(Remedy 2) Perform the zeroing operation and re-start the operation.
0315000 Table
θθ
θθ
θ Timing Task has not been completed unable to continue.
0316000 Table
θθ
θθ
θ data The data was detected outside of the possible range.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
If the machine is not reset to its normal condition, shut down the power of
the machine once and power up the machine again. After that, re-start
the operation. When the same error still occurs, contact our service per-
sonnel for details.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 19 AFU01ETRP
Error ID Item Description
0317000 Table
θθ
θθ
θ Origin Zeroing Opn. Not Complete
(Cause 1) The motor axis was activated before the zeroing operation was completed.
(Remedy 1) Perform the zeroing operation.
0401000 Screen Y Origin Zeroing opn. was incompleted, within specified time.
(Cause 1) Dirt adheres to the sensor and the optical beam is shielded.
(Cause 2) The sensor is defective.
(Cause 3) The driver is malfunctioning or an error has occurred during communication
with the host CPU.
(Remedy 1) Wipe off dirt on the sensor and zero the screen Y again.
(Remedy 2) It is required to replace the sensor with a new one. Contact our service
personnel for details.
(Remedy 3) Shut down the power of the machine once and power up the machine
again. After that, perform the zeroing operation.
If this operation does not reset the machine to its normal condition, the
driver may be defective. Contact our service personnel for details.
0402000 Screen Y Origin Detect lost pulse error.
(Cause 1) The motor is overloaded and has a loss of synchronism.
(Remedy 1) Check for any obstacle around the screen Y axis and then perform the
zeroing operation.
If this operation does not reset the machine to its normal condition, con-
tact our service personnel for details.
0405000 Screen Y Servo Driver alarm signal was detected.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
If this operation does not reset the machine to its normal condition, con-
tact our service personnel for details.
2.3 Error IDs and Remedial Procedures
0106-002 Chapter 2 2 20 AFU01ETRP