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0106-001 Chapter 2 2 74 AFU01ETRP

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Error ID Item Description
2203000 Vacuum Pump Vacuum plate side change timeover
(Cause 1) The suction changeover cylinder might be malfunctioning or the cylinder
sensor might be defective.
(Remedy 1) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
2.3 Error IDs and Remedial Procedures
0106-001 Chapter 2 2 73 AFU01ETRP
0106-001 Chapter 2 2 74 AFU01ETRP
Chapter 3
0004-001 Chapter 3 1 AFU01EiINP
Maintenance
This chapter describes periodic maintenance operations, etc.
for those who are in charge of the machine maintenance.
Coverage: This chapter covers the periodic maintenance
operations, the list of consumables and servic-
ing parts, the air piping diagrams, and the elec-
trical circuit diagrams, etc.