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II- 25 Programming Manual Part II Inspection Data Step9: The dialog shown in Figure 1-46 appears. Make sure that coordinates are entered correctly . CAUTION If 0 or 999999 are entered as coordinates, press Reset to reset…

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Programming Manual

Part II Inspection Data

Step7: The dialog shown in Figure 1-44 appears. Check Fiducial Mark Number and enter a sub

mark number. After all the settings are completed, press OK.

Figure 1-44 Fiducial Mark Number

Step8: Select Edit > SubMark from the menu-bar.

Figure 1-45 Sub Mark

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Programming Manual

Part II Inspection Data

Step9: The dialog shown in Figure 1-46 appears.

Make sure that coordinates are entered correctly.

CAUTION

If 0 or 999999 are entered as coordinates, press Reset to reset the sub mark.

Press OK.

Figure 1-46 Sub Mark Edit

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Programming Manual

Part II Inspection Data

1.3 Auto Deployment of Inspection Data

If a component does not have a corresponding library, inspection data needs to be made individually.

Use the auto deployment of inspection data to make inspection data easily.

The auto deployment procedure differs between chip components and IC components.

1.3.1 Auto Deployment of Chip Component

Step1: Right-click the center of CAD data. The dialog shown in Figure 1-47 appears.

Figure 1-47 Auto Deployment of Chip Component 1

Step2: Select Add New Window from the right-click menu and repeat it three times to make three

inspection windows. Adjust the ﬁ rst inspection window size to surround an electrode and

body of a component. Adjust the second inspection window size to surround a body of a

component. Adjust the third inspection window size to surround a pad, electrode, and body

of a component.

(1) Electrode and Body (2) Body (3) Pad, Electrode, and Body

Figure 1-48 Auto Deployment of Chip Component 2