sh030106u.pdf - 第13页
4 10.3 Dynamic brake character istic s ............................................................................................ .......... 10- 8 10.3.1 Dy namic brake operation .......................................…

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6.1.2 Adjustment using MR Configurator2 .......................................................................................... 6- 2
6.2 One-touch tuning .............................................................................................................................. 6- 3
6.2.1 One-touch tuning flowchart ........................................................................................................ 6- 5
6.2.2 Display transition and operation procedure of one-touch tuning ............................................... 6- 7
6.2.3 Caution for one-touch tuning ..................................................................................................... 6-17
6.3 Auto tuning ....................................................................................................................................... 6-18
6.3.1 Auto tuning mode ...................................................................................................................... 6-18
6.3.2 Auto tuning mode basis ............................................................................................................. 6-19
6.3.3 Adjustment procedure by auto tuning ....................................................................................... 6-20
6.3.4 Response level setting in auto tuning mode ............................................................................. 6-21
6.4 Manual mode ................................................................................................................................... 6-22
6.5 2 gain adjustment mode ................................................................................................................... 6-25
7. SPECIAL ADJUSTMENT FUNCTIONS 7- 1 to 7-38
7.1 Filter setting ...................................................................................................................................... 7- 1
7.1.1 Machine resonance suppression filter........................................................................................ 7- 2
7.1.2 Adaptive filter II ........................................................................................................................... 7- 5
7.1.3 Shaft resonance suppression filter ............................................................................................. 7- 7
7.1.4 Low-pass filter ............................................................................................................................ 7- 8
7.1.5 Advanced vibration suppression control II ................................................................................. 7- 8
7.1.6 Command notch filter ................................................................................................................ 7-13
7.2 Gain switching function .................................................................................................................... 7-15
7.2.1 Applications ............................................................................................................................... 7-15
7.2.2 Function block diagram ............................................................................................................. 7-16
7.2.3 Parameter .................................................................................................................................. 7-17
7.2.4 Gain switching procedure .......................................................................................................... 7-20
7.3 Tough drive function ........................................................................................................................ 7-24
7.3.1 Vibration tough drive function .................................................................................................... 7-24
7.3.2 Instantaneous power failure tough drive function ..................................................................... 7-26
7.4 Compliance with SEMI-F47 standard .............................................................................................. 7-30
7.5 Model adaptive control disabled ...................................................................................................... 7-33
7.6 Lost motion compensation function ................................................................................................. 7-34
7.7 Super trace control ........................................................................................................................... 7-37
8. TROUBLESHOOTING 8- 1 to 8-16
8.1 Explanation for the lists ..................................................................................................................... 8- 1
8.2 Alarm list ........................................................................................................................................... 8- 2
8.3 Warning list ...................................................................................................................................... 8-12
8.4 Troubleshooting at power on ........................................................................................................... 8-15
9. DIMENSIONS 9- 1 to 9-22
9.1 Servo amplifier .................................................................................................................................. 9- 1
9.2 Connector......................................................................................................................................... 9-20
10. CHARACTERISTICS 10- 1 to 10-16
10.1 Overload protection characteristics .............................................................................................. 10- 1
10.2 Power supply capacity and generated loss .................................................................................. 10- 5

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10.3 Dynamic brake characteristics ...................................................................................................... 10- 8
10.3.1 Dynamic brake operation ....................................................................................................... 10- 9
10.3.2 Permissible load to motor inertia when the dynamic brake is used ...................................... 10-12
10.4 Cable bending life ........................................................................................................................ 10-13
10.5 Inrush currents at power-on of main circuit and control circuit .................................................... 10-14
11. OPTIONS AND PERIPHERAL EQUIPMENT 11- 1 to 11-126
11.1 Cable/connector sets .................................................................................................................... 11- 1
11.1.1 Combinations of cable/connector sets ................................................................................... 11- 2
11.1.2 MR-D05UDL3M-B STO cable ................................................................................................ 11- 6
11.1.3 SSCNET III cable ................................................................................................................... 11- 7
11.1.4 Battery cable/junction battery cable ....................................................................................... 11- 9
11.2 Regenerative options ................................................................................................................... 11-10
11.2.1 Combination and regenerative power ................................................................................... 11-10
11.2.2 Selection of regenerative option............................................................................................ 11-12
11.2.3 Parameter setting .................................................................................................................. 11-16
11.2.4 Connection of regenerative option ........................................................................................ 11-16
11.2.5 Mounting direction .................................................................................................................. 11-22
11.2.6 Dimensions ............................................................................................................................ 11-23
11.3 FR-BU2-(H) brake unit ................................................................................................................. 11-27
11.3.1 Selection ................................................................................................................................ 11-27
11.3.2 Brake unit parameter setting ................................................................................................. 11-28
11.3.3 Connection example ............................................................................................................. 11-29
11.3.4 Dimensions ............................................................................................................................ 11-37
11.4 FR-RC-(H) power regeneration converter ................................................................................... 11-40
11.5 FR-CV-(H) power regeneration common converter ..................................................................... 11-44
11.5.1 Model designation ................................................................................................................. 11-45
11.5.2 Selection ................................................................................................................................ 11-45
11.6 Junction terminal block PS7DW-20V14B-F (recommended) ...................................................... 11-53
11.7 MR Configurator2 ......................................................................................................................... 11-54
11.7.1 Engineering software ............................................................................................................ 11-54
11.7.2 Precautions for using USB communication function ............................................................. 11-55
11.8 Battery .......................................................................................................................................... 11-56
11.8.1 Selection of battery ............................................................................................................... 11-56
11.8.2 MR-BAT6V1SET battery ....................................................................................................... 11-56
11.8.3 MR-BAT6V1BJ battery for junction battery cable ................................................................. 11-60
11.8.4 MR-BT6VCASE battery case ................................................................................................ 11-64
11.8.5 MR-BAT6V1 battery .............................................................................................................. 11-70
11.9 Selection example of wires .......................................................................................................... 11-71
11.10 Molded-case circuit breakers, fuses, magnetic contac tors ........................................................ 11-75
11.11 Power factor improving DC reactors .......................................................................................... 11-78
11.12 Power factor improving AC reactors .......................................................................................... 11-80
11.13 Relay (recommended) ............................................................................................................... 11-84
11.14 Noise reduction techniques ....................................................................................................... 11-85
11.15 Earth-leakage current breaker ................................................................................................... 11-92
11.16 EMC filter (recommended) ......................................................................................................... 11-95
11.17 External dynamic brake ........................................................................................................... 11-103
11.18 Panel through attachment (MR-J4ACN15K/MR-J3ACN) ........................................................ 11-113
11.19 Multifunction regeneration converter FR-XC-(H) ..................................................................... 11-118
11.19.1 Multifunction regeneration converters and dedicated stand-alone reactors ..................... 11-118

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11.19.2 Precautions ....................................................................................................................... 11-118
11.19.3 Servo amplifier settings ..................................................................................................... 11-118
11.19.4 Capacity selection ............................................................................................................. 11-119
11.19.5 Connection diagrams ........................................................................................................ 11-121
11.19.6 Wiring and peripheral options ........................................................................................... 11-123
12. ABSOLUTE POSITION DETECTION SYSTEM 12- 1 to 12- 6
12.1 Summary ....................................................................................................................................... 12- 1
12.1.1 Features ................................................................................................................................. 12- 1
12.1.2 Structure ................................................................................................................................. 12- 2
12.1.3 Parameter setting ................................................................................................................... 12- 2
12.1.4 Confirmation of absolute position detection data ................................................................... 12- 2
12.2 Battery ........................................................................................................................................... 12- 3
12.2.1 Using MR-BAT6V1SET battery .............................................................................................. 12- 3
12.2.2 Using MR-BAT6V1BJ battery for junction battery cable ........................................................ 12- 4
12.2.3 Using MR-BT6VCASE battery case ....................................................................................... 12- 5
13. USING STO FUNCTION 13- 1 to 13-14
13.1 Introduction ................................................................................................................................... 13- 1
13.1.1 Summary ................................................................................................................................ 13- 1
13.1.2 Terms related to safety .......................................................................................................... 13- 1
13.1.3 Cautions ................................................................................................................................. 13- 1
13.1.4 Residual risks of the STO function ......................................................................................... 13- 2
13.1.5 Specifications ......................................................................................................................... 13- 3
13.1.6 Maintenance ........................................................................................................................... 13- 4
13.2 STO I/O signal connector (CN8) and signal layouts ..................................................................... 13- 4
13.2.1 Signal layouts ......................................................................................................................... 13- 4
13.2.2 Signal (device) explanations .................................................................................................. 13- 5
13.2.3 How to pull out the STO cable ............................................................................................... 13- 5
13.3 Connection example ..................................................................................................................... 13- 6
13.3.1 Connection example for CN8 connector ................................................................................ 13- 6
13.3.2 External I/O signal connection example using an MR-J3-D05 safety logic unit .................... 13- 7
13.3.3 External I/O signal connection example using an external safety relay unit ......................... 13-10
13.3.4 External I/O signal connection example using a motion controller ....................................... 13-11
13.4 Detailed description of interfaces ................................................................................................. 13-12
13.4.1 Sink I/O interface ................................................................................................................... 13-12
13.4.2 Source I/O interface .............................................................................................................. 13-14
14. USING A LINEAR SERVO MOTOR 14- 1 to 14-36
14.1 Functions and configuration .......................................................................................................... 14- 1
14.1.1 Summary ................................................................................................................................ 14- 1
14.1.2 Servo system with auxiliary equipment .................................................................................. 14- 2
14.2 Signals and wiring ......................................................................................................................... 14- 6
14.3 Operation and functions ................................................................................................................ 14- 8
14.3.1 Startup .................................................................................................................................... 14- 8
14.3.2 Magnetic pole detection ........................................................................................................ 14-11
14.3.3 Home position return ............................................................................................................. 14-20
14.3.4 Test operation mode in MR Configurator2 ............................................................................ 14-24