CM602all_EJM8AESM_Service Manual.pdf - 第1069页
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8 Control Hardware
This chapter describes the control hardware.
EJM8A-E-SMAA-0000
Confidential
Control Hard
Control Hard
Contorl Unit
8-1-1 Layout
Control Unit
8-1
6
5
8
Vacuum
pump
DR7 DR8
DR5 DR6
Main SW
NF0ECX
Feeder control board
FDD
NF0ECX
Feeder control board
DR2 DR1
Feeder control board Feeder control board
DR4 DR3
θaxis
powe
r
CPU
BOX
Line camera change
CNT board
NF28CX
Y
axis
X
axis
Y
axis
X
axis
Y
axis
X
axis
POWER
UNIT＃１
AC terminal
box
LED
light source
#2
#1
Vacuum
pump
TB5
TB4
NF0ECX NF0ECX
LED
light source
#9
θ-axis
powe
r
#5
POWER
UNIT＃2
NF2ACX
NF2ACX
Earth plateEarth plate
Y
axis
X
axis
HUB board
NF8BCX
#4
#3
#Ｃ
#Ｄ
#A
#B
①⑯
D9
width
adjustment
ＤＡ
width
adjustment
Earth plate
Earth plate
EJM8A-E-SMA080101-A01-00
Page 8-1-1-1