CM602all_EJM8AESM_Service Manual.pdf - 第245页
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles) Remarks Item Press [Unlock] and [Exchange pos tch] simultaneously. The head camera recognizes the nozzle changer and the jigs automatically. Press [Unlock] …
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Press [Nozzle exchange pos].
Select the stage to be taught.
Press [Unlock] and [Jig setting] simultaneously.
The head moves away and the nozzle-
changer cover opens.
Put the jigs into the nozzle changer.
Put the jigs into Nozzle
Changer Positions 11 and
66.
Put Nozzle 130 into
Nozzle Position 3.
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4
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Item
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Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Press [Unlock] and [Exchange pos tch] simultaneously.
The head camera recognizes the nozzle
changer and the jigs automatically.
Press [Unlock] and [Height teach] simultaneously.
Head 3 descends to the nozzle changer
and the height is measured
automatically.
Press [Unlock] and [Jig remove] simultaneously.
The head moves to the nozzle setting
position (above the NG box).
Remove the jigs and
Nozzle 130.
Press [Unlock] and the "Return" key simultaneously.
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Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Press [Unlock] and [Run] simultaneously.
The axes of the selected stage return to
the origin.
The offsets are entered into the following screen:
Offset range:
X: -2.0 mm to 2.0 mm
Y: -2.0 mm to 2.0 mm
Z: -2.0 mm to 2.0 mm
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