CM602all_EJM8AESM_Service Manual.pdf - 第296页
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles) Remarks Item Press [Unlock] and [Exchange pos tch] simultaneously. The jigs in the nozzle changer are recognized by the head camera automatically. Press [Un…
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Press [Nozzle exchange pos].
Select the stage to be taught.
Press [Unlock] and [Jig setting] simultaneously.
The head assembly moves away and the
nozzle changer cover opens.
Set the jigs into the nozzle changer.
Take care with the orientation of the jig. Set the jigs into Nos. 11
and 35 of the nozzle
changer.
Put Nozzle 1003 onto
Head 3.
3
4
1
Item
2
should face
upwards
EJM8A-E-SMA040309-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press [Unlock] and [Exchange pos tch] simultaneously.
The jigs in the nozzle changer are
recognized by the head camera
automatically.
Press [Unlock] and [Height teach] simultaneously.
Head 3 descends to the nozzle changer
and the height is measured
automatically.
Press [Unlock] and [Jig remove] simultaneously.
The head assembly moves to the jig
setting position (over the NG box).
Press the "Return" key.
5
6
7
8
EJM8A-E-SMA040309-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press [Unlock] and [Run] simultaneously.
All axes of the selected stage return to
the origin.
The offsets are entered into the screen below:
Offset range:
X：-2.0mm to 2.0mm
Y：-2.0mm to 2.0mm
Z：-2.0mm to 2.0mm
9
10
EJM8A-E-SMA040309-A01-00
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