CM602all_EJM8AESM_Service Manual.pdf - 第264页

Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles) Remarks Item Press [Unlock] and [ θ axis org offset Mgf power teach]. The jig is recognized by the chip recognition camera so that the offsets for the theta…

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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Press [Chip recog camera
θaxis OriginOffset].
If 0 is displayed in the
"Magnifying power" boxes
shown at left, enter a
tentative vale of 0.01.
Press [Chip recog camera
θaxis OriginOffset].
Select the stage to be taught.
Press [Unlock] and [Jig setting] simultaneously.
The head moves to the jig set position (to
the center of the stage).
Set the jig on Head 3.
1
Item
4
2
3
EJM8A-E-SMA040304-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press [Unlock] and [θaxis org offset Mgf power teach].
The jig is recognized by the chip
recognition camera so that the offsets for
the theta-axis origin and the camera
magnification are entered.
Select "Yes" or "No."
Press [Unlock] and [Angle teach] simultaneously.
After auto recognition, an angle offset is
entered.
Specification:
Theta should be within
+/- 0.05°
If the offset exceeds the
specification, an error will
occur. To avoid an error,
adjust the chip camera.
See Section 4-1-1
"Chip Recognition
Camera Theta Positionig"
Press [Unlock] and [Recog posn tch] simultaneously.
After auto recognition, a recognition
position offset is entered.
If the head theta guide is positioned left,
select "No" so that the jig is recognized immediately.
If the head theta guide is positioned right,
select "Yes" so that the guide rotates 180 degrees and the jig is
recognized.
6
5
8
7
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press [Unlock] and [Jig setting] simultaneously.
The head moves to the jig set position
(over the NG box).
Remove the jig from
Head 3.
Set the jig.
Set the jig on Head 2.
Press [Unlock] and [Nzl anglOrgOffset] simultaneously.
The theta-axis origin offset for each head
is entered.
Teach Heads 1 and 2,
following Steps 7 to 9.
Press [Unlock] and [Jig remove] simultaneously.
The head moves to the jig set position
(over the NG box).
Remove the jig from
Head 2.
10
12
11
9
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