CM602all_EJM8AESM_Service Manual.pdf - 第458页
Machinery Part Replacement Remarks Light Transfer-Head Assembly (8-nozzle type) Item Block Chart 6 MC14CX#1 CN1 CN9 CN12 CN10 CN7 CN6 CN5 CN2 CN3 CN4 MC15CX MC14CX#2 CN1 CN9 CN12 CN10 CN7 CN6 CN5 CN2 CN3 CN4 CN10 CN6 CN4…
Machinery Part Replacement
Remarks
Light Transfer-Head Assembly (8-nozzle type)
Item
Cable La
y
ou
t
5
FRONT
BOTTOM
LEFT SIDE
RIGHT SIDE TOP
BACK
MC14CX#1
MC14CX#2
MC15CX
ΘMOTOR
Head Camera
真空ｾﾝｻｰｹｰﾌﾞﾙ
Vacuum Sensor
真空切替ﾊﾞﾙﾌﾞｹｰﾌﾞﾙ
Vacuum Valve
ﾌﾞﾛｰﾊﾞﾙﾌﾞｹｰﾌﾞﾙ
Head Blow
基板間信号ｹｰﾌﾞﾙ
Board Signal
基板間電源ｹｰﾌﾞﾙ
Board Power
冷却ﾌｧﾝｹｰﾌﾞﾙ
Cooling FAN
Z軸ﾓｰﾀｰｹｰﾌﾞﾙ
Zaxis motor
θ
軸ﾓｰﾀｰｹｰﾌﾞﾙ
θ
axis motor
EJM8A-E-SMA050312-A01-00
Page 5-3-12-3
Machinery Part Replacement
Remarks
Light Transfer-Head Assembly (8-nozzle type)
Item
Block Chart
6
MC14CX#1
CN1
CN9
CN12
CN10
CN7
CN6
CN5
CN2
CN3
CN4
MC15CX
MC14CX#2
CN1
CN9
CN12
CN10
CN7
CN6
CN5
CN2
CN3
CN4
CN10
CN6
CN4
CN9
CN12
CN5
CN3
CN1
CN7
CN2
CN8
M
θ-axis
Motor
CN11
Z1-axis Motor
Z2-axis Motor
Z3-axis Motor
Z4-axis Motor
M
M
M
M
Vacuum Valves VL11 to VL14
Vacuum Sensors 1 to 4
Cooling Fan 1
Blow Valves 1 to 4
M
Z5-axis Motor
Z6-axis Motor
Z7-axis Motor
Z8-axis Motor
M
M
M
M
Vacuum Valves VL15 to VL18
Vacuum Sensors 5 to 8
Blow Valves 5 to 8
CPU
BOX
DC
Power
Supply
I/O
Board
24V
EJM8A-E-SMA050312-A01-00
Page 5-3-12-4
Machinery Part Replacement
Remarks
Light Transfer-Head Assembly (8-nozzle type)
Item
Vacuum/Air Tube Layout
7
TOP
MC15CX
FRONT RIGHT SIDE
MC14CX#1
ΘMOTOR
BOTTOM
LEFT SIDEBACK
MC14CX#2
Head Camera
真空用配管
VACUUM TUBE
AIR TUBE
ｴｱｰ配管
EJM8A-E-SMA050312-A01-00
Page 5-3-12-5