CM602all_EJM8AESM_Service Manual.pdf - 第244页
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles) Remarks Press [Nozzle exchange pos]. Select the stage to be taught. Press [Unlock] and [Jig setting] simultaneously. The head moves away and the nozzle- cha…
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
This section describes the procedures for determining the nozzle exchange position.
Tools
None
Jig
Non registered
Nozzle Changer Position
Recognition Jig
Nozzle 120 or 130
4-2-9 Nozzle Exchange Position
Clean the upper surface of the nozzle changer beforehand.
Assembly
A
d
j
ustment
min.
Teaching
5 min.
Total Time Weight of
Part
Removal
Disassembl
y
min.
5 min.
kgs
Caution
Dange
r
Warning
EJM8A-E-SMA040209-A01-00
Page4-2-9-1
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Press [Nozzle exchange pos].
Select the stage to be taught.
Press [Unlock] and [Jig setting] simultaneously.
The head moves away and the nozzle-
changer cover opens.
Put the jigs into the nozzle changer.
Put the jigs into Nozzle
Changer Positions 11 and
66.
Put Nozzle 130 into
Nozzle Position 3.
3
4
1
Item
2
EJM8A-E-SMA040209-A01-00
Page4-2-9-2
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Press [Unlock] and [Exchange pos tch] simultaneously.
The head camera recognizes the nozzle
changer and the jigs automatically.
Press [Unlock] and [Height teach] simultaneously.
Head 3 descends to the nozzle changer
and the height is measured
automatically.
Press [Unlock] and [Jig remove] simultaneously.
The head moves to the nozzle setting
position (above the NG box).
Remove the jigs and
Nozzle 130.
Press [Unlock] and the "Return" key simultaneously.
5
6
7
8
EJM8A-E-SMA040209-A01-00
Page4-2-9-3