Q170226E01.pdf - 第220页
5.35 M e c hanical V alve Replacement and Adjustment SERVICE MANUAL RH5 5.35−3 DA3SEC−83−9T0−A0 4. In SEMI mode, turn the hand wheel to check the opening/closing timing of the respective chuck. =REFERENCE= T ransfer chuc…
Cam
Roller
NG OK NG
Cam
Roller
NG OK NG
Cam rise
Cam
groove
The roller of the mechanical valve turns
manually and 0.03 mm thickness gauge
cannot be fit
Fitting bolt of the mechanical valve
(2−M4)
RH5
5.35 Mechanical V alve Replacement and Adjustment
SERVICE MANUAL
5.35−2
DA3SEC−83−9T0−A0
3. Check the following items at the groove of
the cam for respective chuck.
(1) The roller of the mechanical valve is
parallel to the cam.
(2) The roller of the mechanical valve is
placed at the cam center.
(3) The roller of the mechanical valve
turns manually and 0.03 mm thickness
gauge cannot be fit in between the
cam and roller.
=CHECK=
If NG state is found, loosen the fitting
bolt of the mechanical valve (2−M4)
and move the mechanical valve for
adjustment.
5.35 Mechanical V alve Replacement and Adjustment
SERVICE MANUAL
RH5
5.35−3
DA3SEC−83−9T0−A0
4. In SEMI mode, turn the hand wheel to
check the opening/closing timing of the
respective chuck.
=REFERENCE=
Transfer chuck:
Open: 86q , Close: 265q
Insertion chuck:
Open: 200q , Close: 81q
Guide chuck:
Open: 214q
The tolerance of open/close timing
shall be r 1q.
=REMARKS=
Refer to ‘5.12 Insertion Head Chuck
Opening/Closing Timing
Check/
Adjustment’.
RH5
5.35 Mechanical V alve Replacement and Adjustment
SERVICE MANUAL
5.35−4
DA3SEC−83−9T0−A0
= MEMO =