IPC-TM-650 EN 2022 试验方法.pdf - 第107页

IPC-2-2-21-5 Figure 5 Planarity Chart for Method.xls 6.4 3.2 1.6 0.8 0.4 0.2 0.1 0.0 10.0 20.0 30.0 40.0 50.0 60.0 70.0 80.0 90.0 100.0 T race Width (mm) Planarity T est Method - Sample A Pr ofilometer Method A % Planari…

5.1.3 To

standardize measurements, use test structures in

whichb=18µm,c=63.5 µm, and the ratio of c/b is 3.5 ±

0.2. If a dielectric film is used, which has been produced at a

fixed thickness other than that outlined above, maintain a c/b

ratio as described. If the standard construction with this

defined ratio cannot be maintained, the actual metal and

dielectric thickness must be reported.

5.1.4 Make

triplicate measurements and average the results

at each line width.

5.2

Calculation of Planarity

5.2.1

Planarity

for an individual trace, P

can be defined by

the following equation:

(1 - d/b)100

where ‘‘a’’ is the trace width, ‘‘d’’ is the bump height over the

trace, and ‘‘b’’ is the copper trace height. For an ideal planar

structure, the value of P is equal to 100%.

5.2.2

Average

planarity, P

ave

for a given trace width is cal-

culated using the triplicate measurements:

ave

=(P

)/3

5.2.3

Total average planarity, P

total

, is the average planarity

for all widths of traces (where n = number of traces widths

measured):

total

ave1

ave2

.......+ P

ave

)/n

5.3

Report

5.3.1

Report

the average planarity for each trace width

measured (see 5.2.2).

5.3.2

Report

the total average planarity as a single average

percentage of all seven trace width averages (see 5.2.3).

5.3.3

Also

report the technique, profilometer or cross-

section, used to obtain the measurements.

This calculation can be performed for each trace width to

develop a planarity plot.

6 Notes

6.1

Cross Section Method

Due

to the field of view

required for the larger trace widths (> 0.8 mm), accurate mea-

surements of the dielectric ‘‘bump’’ may not be possible due

to the low magnification. One option is to use a higher mag-

nification and measure the total dielectric and copper trace

height from the substrate surface and subtract the minimum

dielectric height over the substrate alone.

6.1

Planarity Test Method Sample

example of a pla-

narity test method is given in Figure 5.

IPC-2-2-21-4

Figure

4 Cross Section of Window Used for Dielectric

Thickness Measurement

ofilometer Stylus

Direction

of Scan

Height at Exit

Dielectric

Height at Entry

``Window´´ in Dielectric

IPC-TM-650

Number

2.2.21

Subject

Planarity

of Dielectrics for High Density Interconnection (HDI)/

Microvia Technology

Date

11/98

Revision

age3of4

电子技术应用　　　　　　　ｗｗｗ．ＣｈｉｎａＡＥＴ．ｃｏｍ

IPC-2-2-21-5

Figure

5 Planarity Chart for Method.xls

6.4

3.2

1.60.8

0.40.2

0.1

0.0

10.0

20.0

30.0

40.0

50.0

60.0

70.0

80.0

90.0

100.0

race Width (mm)

Planarity Test Method - Sample A

ofilometer Method A

% Planarity

X-Section Method A

IPC-TM-650

Number

2.2.21

Subject

Planarity

of Dielectrics for High Density Interconnection (HDI)/

Microvia Technology

Date

11/98

Revision

age4of4

电子技术应用　　　　　　　ｗｗｗ．ＣｈｉｎａＡＥＴ．ｃｏｍ

1 Purpose This procedure establishes proper methods and

practices for quantifying the surface topography/texture of

metallic foil using a noncontact, optical or laser, 3-D surface

measurement device. The primary reported values will include

Sa, Sq and Sz (see 6.3 for further information on these param-

eters) where S values are 3-D measures.

2 Applicable Documents

2.1 IPC

IPC-4562 Metal Foil for Printed Board Applications

2.2 International Standards

ISO 16610 Geometrical Product Specifications (GPS) –

Filtration

ISO 25178-2 Surface Texture: Areal – Part 2: Terms, Defini-

tions and Surface Texture Parameters

3 Metallic Foil Sample Preparation

3.1

The samples tested will be a single-layer material taken

from a representative location of metallic foil. The size of the

physical sample will be determined based on the easiest

method for obtaining a representative sample, but should be

no larger than 50 mm x 50 mm [nominally 2 in x 2 in]. Opera-

tors of the measurement tool will orient the sample so the

measurements are across the machine direction of the foil

sample or the surface of the Physical NIST Traceable

Standards.

3.2 The samples will be tested as received, but proper care

must be taken to prevent scratches, dents or bending to

insure the integrity of the surface. Operators of the measure-

ment tool will orient the sample so that the measurements are

across the machine direction of the foil sample.

4 Equipment / Environment

4.1

A noncontact 3-D tool will be used for this procedure

and it will be calibrated according to the machine manufactur-

er’s instructions.

Examples: Wyko-NT-1100, Zygo 5000, Zygo 600, Veeco

NT-9300, Keyence VK-9700 or equivalent.

4.2 The tool will be placed on a lab bench or other sturdy

table top and should be placed in an area away from

machines that produce large amounts of noise/vibration.

Follow test device manufacturer’s recommendations for envi-

ronmental conditions, including for vibration.

5 Procedure for testing upon metallic foil and physical

NIST Traceable Standards

5.1

The operator will set up the measurement tool program

to scan a minimum area of 200,000 square microns having a

maximum length to width aspect ratio of 5:1 with an objective

magnification of 50X for measuring the surface roughness of

either a physical standard or a foil sample. Such specification

requirements may necessitate stitching or ‘‘step and repeat-

ing’’ multiple images so as to obtain data from a properly

sized area.

5.2 No filters shall be used with this test method.

5.3 Prior to measurement of metallic foil samples the tool

operator will assure the 3-D tool is currently properly cali-

brated. Verification needs to be performed by testing the

actual physical NIST Traceable Standards at least monthly on

the 3-D measurement tool.

5.4 Physical Standards will be oriented so the measurement

is perpendicular to the grain of the Standards. Operator will

locate the measurement center point in the XY axis to match

the XY center point of the specific patch being measured on

the Standard set. This is done to assure the measurement

always takes place in the same location upon the Standard

surface.

1. www.ipc.org

2. www.iso.org

3000 Lakeside Drive, Suite 105N

Bannockburn, IL 60015-1249

IPC-TM-650

TEST METHODS MANUAL

Number

2.2.22

Subject

Noncontact Metallic Foil Surface Topography/

Texture

Date

5/20

Revision

Originating Task Group

Metallic Foil Task Group (3-12a)

Material in this Test Methods Manual was voluntarily established by Technical Committees of IPC. This material is advisory only

and its use or adaptation is entirely voluntary. IPC disclaims all liability of any kind as to the use, application, or adaptation of this

material. Users are also wholly responsible for protecting themselves against all claims or liabilities for patent infringement.

Equipment referenced is for the convenience of the user and does not imply endorsement by IPC.

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