IPC-TM-650 EN 2022 试验方法.pdf - 第496页

3330 !**** END CALIBRATION OF UNIT **** 3340 ! 3400 !**** OPEN 16453A FIXTURE MEASUREMENT **** 3410 ON INTR Scode GOTO Open_end1 3420 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’ 3430 ENTER @Hp4291;Opc 3440 INPUT ‘‘CONNECT FIXTURE AND …

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1530
!
1600 !**** SET PTFE STANDARD THICKNESS IN METERS
ON LINE 1610****
1610 OUTPUT @Hp4291;‘‘CALC:MATH1:DIM1 0.00075’’
1620 !
1700 !**** MEASUREMENT TYPE er’ AND tan delta ****
1710 OUTPUT @Hp4291;‘‘DUAM DRLT’’
1720 !
1800 !**** FORMAT LINES LIN Y-AXIS ****
1810 OUTPUT @Hp4291;‘‘DISP:TRAC:Y:SPAC LIN’’
1820 !
1900 !**** SWEEP SETTINGS ****
1910 OUTPUT @Hp4291;‘‘SENS:SWE:SPAC LOG’’
1920 OUTPUT @Hp4291;‘‘SENS:SWE:TIME:AUTO ON’’
1930 OUTPUT @Hp4291;‘‘SENS:SWE:POIN 256’’
1940 OUTPUT @Hp4291;‘‘SENS:SWE:DWEL1:AUTO ON’’
1950 !
2000 !**** CHANNEL 1 SETUP ****
2010 OUTPUT @Hp4291;‘‘INST CH1’’
2020 OUTPUT @Hp4291;‘‘CALC:FORM REAL’’
2030 OUTPUT @Hp4291;‘‘DISP:TRAC1:STAT ON’’
2040 OUTPUT @Hp4291;‘‘DISP:TRAC1:Y:BOTT 1’’
2050 OUTPUT @Hp4291;‘‘DISP:TRAC1:Y:TOP 12’’
2060 OUTPUT @Hp4291;‘‘CALC:EVAL:ON’’‘‘TR1’’’’’’
2070 OUTPUT @Hp4291;‘‘CALC:EVAL:Y:XPOS 1MHZ’’
2080 OUTPUT @Hp4291;‘‘CALC:EVAL:MST ON’’
2090 !
2200 !**** CHANNEL 2 SETUP ****
2210 OUTPUT @Hp4291;‘‘INST CH2’’
2220 OUTPUT @Hp4291;‘‘CALC:FORM LTAN’’
2230 OUTPUT @Hp4291;‘‘DISP:TRAC1:STAT ON’’
2240 OUTPUT @Hp4291;‘‘DISP:TRAC1:Y:BOTT -0.5’’
2250 OUTPUT @Hp4291;‘‘DISP:TRAC1:Y:TOP 1.5’’
2260 OUTPUT @Hp4291;‘‘CALC:EVAL:ON’’‘‘TR1’’’’’’
2270 OUTPUT @Hp4291;‘‘CALC:EVAL:Y:XPOS 1MHZ’’
2280 OUTPUT @Hp4291;‘‘CALC:EVAL:MST ON’’
2290 OUTPUT @Hp4291;‘‘INST CH1’’
2300 !
2400 !**** SETUP AVERAGING ****
2410 OUTPUT @Hp4291;‘‘SENS:AVER1 ON’’
2420 OUTPUT @Hp4291;‘‘SENS:AVER1:COUN 10;STAT
ON’’
2430 !
2500 !**** SELECT 16453A FIXTURE AND COMPENSATE ****
2510 !**** PLEASE SET PTFE STANDARD PERMITTIVITY ON
LINE 2580 ****
2520 !**** PLEASE SET PTFE STANDARD LOSS TANGENT
ON LINE 2590 ****
2530 !**** PLEASE SET PTFE STANDARD THICKNESS IN
METERS ON LINE 2600 ****
2540 OUTPUT @Hp4291;‘‘DISP:FORM ULOW’’
2550 OUTPUT @Hp4291;‘‘DISP:ALL BST’’
2560 OUTPUT @Hp4291;‘‘SYST:FIXT HP16453’’
2570 OUTPUT @Hp4291;‘‘SENS:CORR2:CKIT2 TEFL’’
2580 OUTPUT @Hp4291;‘‘SENS:CORR2:CKIT2:STAN6:PRE
2.1’’
2590 OUTPUT @Hp4291;‘‘SENS:CORR2:CKIT2:STAN6:PLF
0.0001’’
2600 OUTPUT @Hp4291;‘‘SENS:CORR2:CKIT2:STAN6:
THIC 0.00075’’
2610 OUTPUT @Hp4291;‘‘SENS:CORR2:CKIT2:SAVE’’
2620 !
2700 !**** OPEN STANDARD MEASUREMENT ****
2710 ON INTR Scode GOTO Open_end
2720 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
2730 ENTER @Hp4291;Opc
2740 INPUT ‘‘CONNECT OPEN (OS) STANDARD, THEN
PRESS [RETURN OR x1]’’,A$
2750 ENABLE INTR Scode;2
2760 OUTPUT @Hp4291;‘‘SENS:CORR1:COLL STAN1’’
2770 Wait_open:GOTO Wait_open
2780 Open_end:!
2790 !
2900 !**** SHORT STANDARD MEASUREMENT ****
2910 ON INTR Scode GOTO Short_end
2920 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
2930 ENTER @Hp4291;Opc
2940 INPUT ‘‘CONNECT SHORT (0 OHM) STANDARD,
THEN PRESS [RETURN OR x1]’’,A$
2950 ENABLE INTR Scode;2
2960 OUTPUT @Hp4291;‘‘SENS:CORR1:COLL STAN2’’
2970 Wait_short:GOTO Wait_short
2980 Short_end:!
2990 !
3100 !**** 50 OHM LOAD STANDARD MEASUREMENT ****
3110 ON INTR Scode GOTO Load_end
3120 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
3130 ENTER @Hp4291;Opc
3140 INPUT ‘‘CONNECT 50 OHM STANDARD, THEN
PRESS [RETURN OR x1]’’,A$
3150 ENABLE INTR Scode;2
3160 OUTPUT @Hp4291;‘‘SENS:CORR1:COLL STAN3’’
3170 Wait_load:GOTO Wait_load
3180 Load_end:!
3190 !
3300 !**** SAVE UNIT CALIBRATION ****
3310 OUTPUT @Hp4291;‘‘SENS:CORR1:COLL:SAVE’’
3320 !
IPC-TM-650
Number
2.5.5.9
Subject
Permittivity
and Loss Tangent, Parallel Plate,
1 MHz to 1.5 GHz
Date
11/98
Revision
P
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3330
!**** END CALIBRATION OF UNIT ****
3340 !
3400 !**** OPEN 16453A FIXTURE MEASUREMENT ****
3410 ON INTR Scode GOTO Open_end1
3420 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
3430 ENTER @Hp4291;Opc
3440 INPUT ‘‘CONNECT FIXTURE AND LOCK GAP OPEN,
THEN PRESS [RETURN OR x1]’’,A$
3460 ENABLE INTR Scode;2
3470 OUTPUT @Hp4291;‘‘SENS:CORR2:COLL STAN4’’
3480 Wait_open1:GOTO Wait_open1
3490 Open_end1:!
3500 !
3600 !**** 16453A FIXTURE SHORT MEASUREMENT ****
3610 ON INTR Scode GOTO Short_end1
3620 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
3630 ENTER @Hp4291;Opc
3640 INPUT ‘‘CLOSE AND SHORT FIXTURE GAP, THEN
PRESS [RETURN OR x1]’’,A$
3650 ENABLE INTR Scode;2
3660 OUTPUT @Hp4291;‘‘SENS:CORR2:COLL STAN5’’
3670 Wait_short1:GOTO Wait_short1
3680 Short_end1:!
3690 !
3800 !**** TEFLON LOAD IN 16453A MEASUREMENT ****
3810 ON INTR Scode GOTO Load_end1
3820 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
3830 ENTER @Hp4291;Opc
3840 INPUT ‘‘PLACE TEFLON STANDARD INTO FIXTURE,
THEN PRESS [RETURN OR x1]’’,A$
3850 ENABLE INTR Scode;2
3860 OUTPUT @Hp4291;‘‘SENS:CORR2:COLL STAN6’’
3870 Wait_load1:GOTO Wait_load1
3880 Load_end1:!
3890 !
4000 !**** SAVE FIXTURE COMPENSATION SETTINGS ****
4010 OUTPUT @Hp4291;‘‘SENS:CORR2:COLL:SAVE’’
4020 !
4030 !**** REPLACE PROGRAM DISK WITH DATA DISK ****
4040 INPUT ‘‘Replace Program with Data Disk, [RETURN OR
x1]’’,A$
4050!
4100 !**** PERMITTIVITY TEST LOOP ****
4110 Test_loop:!
4120 OUTPUT @Hp4291;‘‘INIT:CONT OFF’’
4130 Sweep1_Begin:!
4140 INPUT ‘‘Place Sample In Fixture, Enter Thickness In
mm, [RETURN OR x1]’’,A
4150 B=A/1000
4160 OUTPUT @Hp4291;‘‘CALC:MATH1:DIM1 ’’;B
4170 ON INTR Scode GOTO Sweep1_end
4180 OUTPUT @Hp4291;‘‘STAT:INST:ENAB 1’’
4190 OUTPUT @Hp4291;‘‘*SRE 4’’
4300 OUTPUT @Hp4291;‘‘*CLS;*OPC?’’
4310 ENTER @Hp4291;Opc
4320 OUTPUT @Hp4291;‘‘ABOR’’
4330 ENABLE INTR Scode;2
4340 OUTPUT @Hp4291;‘‘INIT’’
4350 Waiting:GOTO Waiting
4360 Sweep1_end:!
4370 !
4400 !**** SAVE DATA ROUTINE ****
4410 INPUT ‘‘SAVE DATA? [1] Yes; [0] No [RETURN OR
x1]’’,Ans$
4420 IF Ans$<>‘‘1’’ THEN GOTO Sweep1_Begin
4430 INPUT ‘‘Input Job Number [RETURN OR x1]:’’,Job$
4440 OUTPUT @Hp4291;‘‘MMEM:STOR:DINT:TRAC SEL,
‘‘‘‘‘‘;Job$;’’’’‘‘,’’‘‘DISK’’‘‘;’’
4450 GOTO Sweep1_Begin
4460 !**** END MEASUREMENT LOOP *****
4470 !
5000 END
IPC-TM-650
Number
2.5.5.9
Subject
Permittivity
and Loss Tangent, Parallel Plate,
1 MHz to 1.5 GHz
Date
11/98
Revision
P
age5of5
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1
Scope
This
test method describes procedure for measur-
ing dielectric permittivity and loss tangent of embedded pas-
sive materials. The measurements are made in an APC-7
coaxial configuration where the test specimen represents a
load terminating an air-filled coaxial transmission line. The
method is suitable for testing high dielectric constant (high-k)
polymer-composite materials having nominal thickness of
1 µm to 300 µm at frequencies of 100 MHz to 12 GHz. With
proper use and computation the frequency range can be
extended to 18 GHz. Existing measurement methods (see
Section 2) assume quasi-static conditions in the thin film
specimen, whereas this test method produces meaningful
results at frequencies greater than hundreds of megahertz
and where high-dielectric constant, thin film materials are to
be measured.
This test method is for qualification of filled and unfilled, dis-
tributed capacitance, thin film materials where the permittivity
in the frequency range of 100 MHz to 12 GHz is a critical
functional parameter. The method is also applicable to poly-
mer resist materials for embedded passive devices. This
method fills a test method gap within the IPC-TM-650 Test
Methods Manual for thin film, high-k dielectrics.
2
Applicable Documents
IPC-TM-650
Test
Method Manual
2.5.5.1 Permittivity (Dielectric Constant) and Loss Tangent
(Dissipation Factor) of Insulating Material at 1 MHz
(Contacting Electrode Systems)
2.5.5.4 Dielectric Constant and Dissipation Factor of Printed
Wiring Board Material-Micrometer Method
2.5.5.9 Permittivity and Loss Tangent, Parallel Plate, 1 MHz
to 1.5 GHz
ASTM
D 150
Standard
Test Methods for AC Loss Charac-
teristics & Permittivity (Dielectric Constant) of Solid Electrical
Insulating Materials
3
Terminology
3.1
Complex
Permittivity, ε*, ε*=ε
0
(ε’ - jε’’)
where ε
0
=
8.85419
10
-12
F/m
is the dielectric permittivity of air [1], ε’ is
the relative dielectric constant and ε’’ is the relative imaginary
dielectric constant (the dielectric loss).
3.2
Relative
Permittivity, ε
r
*,
is a dimensionless ratio of com-
plex permittivity to the permittivity of air, ε
r
*=ε*/ε
0
= ε’ - jε’’.
3.3
Dielectric
Constant is the real part of the relative permit-
tivity. The symbol used in this document is ε’. Other symbols
such as K, k, K’,k’, ε
r
and ε
r
’ are
exchangeable symbols used
in the technical literature.
3.4
Dielectric
Loss Tangent, tan (δ), is a dimensionless ratio
of the dielectric loss to the dielectric constant, tan (δ)=ε’’/ε’.
3.5 APC-7,
Amphenol 7 mm 50 Ω Coaxial Connector; APC-
3.5 Amphenol 3.5 mm Precision 50 Ω Coaxial Connector.
3.6 Scattering
Coefficient, S
11
,
is a ratio of incoming and
outgoing power waves measured by a network analyzer
through Port 1. S
11
is
complex entity consisting of magnitude,
|S
11
|,
and phase, φ. In this document the circuit parameters
that are complex numbers are in bold font.
3.7
Input
Impedance, Z
in
,
a complex entity consisting of
magnitude and phase.
Z
in
= Z
0
(1 + S
11
)/(1 − S
11
)
(1)
where
Z
0
is
characteristic impedance of the APC-7 air-filled
coaxial line, Z
0
=5
0Ω.
4
Test Specimen
The
test specimen consists of a circular
disk capacitor having the nominal diameter, a, of 3.0 mm with
metal electrodes on both sides. The dielectric thickness, d,
may be in the range of 1 µm to 300 µm (1 µm = 1 micro-
meter).
4.1
Preparation
Conducting
metal electrodes, thickness of
0.1 µm to 0.5 µm, shall be coated on both sides of the dielec-
tric. Sputtered copper or gold is recommended. To avoid
electrical shorting, the diameter of the top electrode, which
faces the Section B of the test fixture (Figure 1), may be
2.85 mm to 3.0 mm. The diameter of the bottom electrode
that faces the Section A (Figure 1), shall be within 3.0 mm to
3.05 mm, matching the diameter of the center conductor pin
(Figure 1). This is the diameter a of the specimen that along
with the specimen dielectric thickness, d, determines the
specimen geometrical capacitance, C
p
(see
Equation (3) in
3000
Lakeside Drive, Suite 309S
Bannockburn, IL 60015-1219
IPC-TM-650
TEST
METHODS MANUAL
Number
2.5.5.10
Subject
High
Frequency Testing to Determine Permittivity
and Loss Tangent of Embedded Passive Materials
Date
07/05
Revision
Originating Task Group
Embedded Devices Test Methods Subcommittee
(D-54)
Material
in this Test Methods Manual was voluntarily established by Technical Committees of IPC. This material is advisory only
and its use or adaptation is entirely voluntary. IPC disclaims all liability of any kind as to the use, application, or adaptation of this
material. Users are also wholly responsible for protecting themselves against all claims or liabilities for patent infringement.
Equipment referenced is for the convenience of the user and does not imply endorsement by IPC.
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