00195982-03_SM_SWS_EN.pdf - 第100页

5 Basic frame – X/Y unit 5.3 Replacing parts 100 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.103: ► Move the wafer table across the whole travel range of the X axis. ► Make sure that the mechanical stop of the…

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 99

Fig.101:

► Fasten the second downholder into place.

Fig.102:

► Fasten the flat ribbon cable to the cables with cable ties.

5 Basic frame – X/Y unit

5.3 Replacing parts

100 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.103:

► Move the wafer table across the whole travel range of the X axis.

► Make sure that the mechanical stop of the X axis has enough space towards the cables. If ne-

cessary, carefully fix the entire cable bunch (see diagram)!

5.3.3 Replacing the Y axis sensors

The two proximity switches monitor the front and back end position stops for the Y axis of the wafer

table. The cable for the relevant proximity switch is connected to the wafer table adapter board.

Fig.104:

1. Proximity switch for Reverse Limit (RL2)

2. Proximity switch for Forward Limit (FL2)

3. Adapter board for wafer table

4. Adapter board cover

For information about wiring, see section 5.2.3 "Overview of sensors" [}70].

► Remove the cover (4) from the wafer table adapter board.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 101

Fig.105:

► Remove the screw (1) or (6) fastening the relevant proximity switch:

– (2) Reverse limit (RL2)

– (3) Forward limit (FL2)

► Unthread the connection cable as far as the wafer table adapter board.

► Use the circuit diagram folder for help and mark the cables connected, if not already marked.

► Unplug all connections from the terminal strip.

► Fit the new proximity switch to the relevant end stop (4) or (5).

► Run the connection cable as far as the wafer table adapter board.

► Connect the connection cable to the relevant terminal strip.

► Fix and gather the cables together with cable ties, where necessary. Make sure that the

cables do not rub against any part or get trapped.

5.3.3.1 Checking the proximity switch

► Switch on the SWS and check the input signals for the proximity switch.

► Enable the proximity switch with a screwdriver.

► Go to the toolbar and select the button Service Settings => Motor settings.

► Select the button GallilMotion_axis1 and then the tab Axis status.

ð The displays shine:

– Forward Limit active

– Reverse Limit active

► Move the axis in both directions. Before the axis moves into the relevant end stop, the proxim-

ity switch must trigger and the relevant display light up.