00195982-03_SM_SWS_EN.pdf - 第24页

2 Overview of the SIPLACE wafer system (SWS) 2.2 Overview of main assemblies 24 Service Manual SIPLACE Wafer System (SWS) 11/2018 View of SWS from the front (magazine lift removed) Fig.5: SWS supply unit, view from the …

2 Overview of the SIPLACE wafer system (SWS)

2.2 Overview of main assemblies

Service Manual SIPLACE Wafer System (SWS) 11/2018 23

View of SWS from behind (machine end)

Fig.4: Overview of SWS – back

1. Basic frame

2. Barcode scanner on the wafer magazine lift or next to the gripper unit (depending on configur-

ation)

2 Overview of the SIPLACE wafer system (SWS)

2.2 Overview of main assemblies

24 Service Manual SIPLACE Wafer System (SWS) 11/2018

View of SWS from the front (magazine lift removed)

Fig.5: SWS supply unit, view from the front

1. Electrical unit, view from the front

2. Computer unit

3. Transformer

4. Push switch

5. Main power filter

6. Solenoid valve

7. Cover

2 Overview of the SIPLACE wafer system (SWS)

2.3 Detailed overview of main assemblies

Service Manual SIPLACE Wafer System (SWS) 11/2018 25

2.3 Detailed overview of main assemblies

Fig.6: Exploded view of main assemblies

1 Supply unit 2 Die ejector

3 Basic frame 4 X/Y unit

5 Wafer support for 8" or 12", fitted to X/Y

unit

6 Flip unit

7 Barcode scanner fitted to side of gripper

or (8) barcode scanner fitted to side of

magazine lift

8 Barcode scanner fitted to side of

magazine lift

9 Wafer-magazine lift 10 Wafer-changer unit