00195982-03_SM_SWS_EN.pdf - 第391页
15 Calibration 15.4 Calibration of the complete wafer handling Service Manual SIPLACE Wafer System (SWS) 11/2018 391 Fig.567: ► Choose Calibrate magazine lift limits . ð The lifting axis detects the upper (forward) and …
15 Calibration
15.4 Calibration of the complete wafer handling
390 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.4.1 Calibrating the wafer lift
HIGH RISK OF SERIOUS INJURIES
► Setup mode must be activated!
The calibration is split into three modules and must be done in the sequence below:
●
15.4.1.1 "Calibrating the magazine lift limit positions" [}390]
●
15.4.1.2 "Calibrating the magazine slot scan position" [}391]
●
15.4.1.3 "Calibrating the wafer transfer position of the magazine with respect to the wafer
table" [}394]
15.4.1.1 Calibrating the magazine lift limit positions
Fig.565:
► Choose Calibration (1).
► Choose Calibration of wafer changer (2).
Fig.566:
► Choose Wafer lift calibration (3).
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 391
Fig.567:
► Choose Calibrate magazine lift limits.
ð The lifting axis detects the upper (forward) and lower (reverse) limit switches of the lift axis.
15.4.1.2 Calibrating the magazine slot scan position
The slot scan sensor detects if there is a wafer frame inside the magazine for each slot.
The magazine is scanned each time if one of the following conditions is true:
●
A new magazine is inserted into the wafer lift.
●
The system has been initialized and a magazine is present inside the lift.
●
In the Products view, Scan magazine is selected.
Fig.568:
► Choose Calibrate wafer presence sensor, to calibrate the position of the wafer presence
sensor with respect to the magazine.
ð The calibration sequence runs automatically.
ð The lifting axis is moved until the magazine plate activates the slot scan sensor. From this
position, the final position for the slot scan sensor is calculated.
► Choose the Position tab, to check whether the calibrated position is correct.
15 Calibration
15.4 Calibration of the complete wafer handling
392 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.569:
► Choose Go to position next to Slot scan position.
Fig.570:
► The magazine plate should now activate the slot sensor (see the figures).
► The LED must be on (2).