00195982-03_SM_SWS_EN.pdf - 第8页
8 Service Manual SIPLACE Wafer System (SWS) 11/2018 12.8.2 Mechanically setting the sag sensor IN19 .. 323 12.8.2.1 Materials and equipment needed .. 323 12.8.2.2 Preparatory tasks .. 324 12.8.2.3 Adjusting (aligni…
7Service Manual SIPLACE Wafer System (SWS) 11/2018
11 Extension groups.. 255
11.1 Wafer supports.. 255
11.1.1 Overview.. 255
11.1.2 Overview of spare parts.. 256
11.1.3 Replacing spare parts.. 257
11.1.3.1 Replacing the complete wafer support.. 257
11.1.3.2 Turning the wafer locking strip by 180 degrees (option for 8" wafer support).. 258
11.1.3.3 Setting the wafer support width.. 259
11.1.3.4 Replacing the driver on the clamp.. 259
11.1.3.5 Replacing the solenoid valve for the clamp.. 260
11.1.3.6 Replacing the clamp assemblies.. 261
11.1.3.7 Replacing the diffuse mode sensor.. 262
11.1.3.8 Calibrating the wafer support.. 262
11.1.3.9 Replacing the screw-in cylinder for the downholder.. 263
11.2 Linear dipping unit (LDU).. 264
12 Wafer stretcher.. 265
12.1 Explanation of the wafer stretcher.. 265
12.1.1 SIPLACE SWS wafer stretcher.. 265
12.1.2 Safety instructions.. 266
12.1.3 Technical data.. 266
12.1.4 Placement accuracy and performance values.. 267
12.1.5 Description.. 267
12.2 Detailed description of "wafer stretching" procedure.. 270
12.3 Preparatory measures for working on the wafer stretcher.. 278
12.4 Removing the wafer stretcher.. 279
12.4.1 Preparing removal of the wafer stretcher.. 279
12.4.2 Dismantling the cover plate and the downholder plates.. 279
12.4.3 Removal on the clamping and lifting cylinder side.. 284
12.4.4 Removal at the wafer changer side.. 288
12.5 Overview of wafer stretcher parts.. 293
12.6 Fitting the wafer stretcher.. 293
12.6.1 Preparations for fitting the wafer stretcher.. 293
12.6.2 Fitting the wafer stretcher to the guide trolley.. 294
12.6.3 Fitting the connections.. 299
12.6.4 Fitting the cover plate and the downholder plates.. 302
12.7 Wafer stretcher - configuration changes.. 305
12.7.1 Mechanically setting the stretch factor.. 305
12.7.1.1 Preparations.. 305
12.7.1.2 Settings.. 306
12.7.2 Setting the frame width for 8" wafer supports.. 307
12.7.2.1 Preparations.. 307
12.7.2.2 Settings.. 308
12.7.3 Converting wafer supports from 8" wafer stretchers to 12" wafer stretchers.. 309
12.7.3.1 Retrofit kit parts: 12" wafer expander.. 309
12.7.3.2 Preparations.. 310
12.7.3.3 Removing the 8" wafer support.. 311
12.7.3.4 Difference when converting the 12" to the 8".. 319
12.8 Setting the sag sensor IN 19.. 320
12.8.1 General information about the sag sensor.. 320
12.8.1.1 Sag sensor assembly structure.. 320
12.8.1.2 Sag sensor assembly function.. 321
12.8.1.3 Explanation of light intensity in connection with foil sag.. 322
8 Service Manual SIPLACE Wafer System (SWS) 11/2018
12.8.2 Mechanically setting the sag sensor IN19.. 323
12.8.2.1 Materials and equipment needed.. 323
12.8.2.2 Preparatory tasks.. 324
12.8.2.3 Adjusting (aligning) the sag sensor.. 324
12.8.3 Setting the switching threshold value.. 329
12.8.3.1 Checking the "switching threshold" function.. 332
12.8.4 Final work.. 332
13 BoxPC, GALIL cards and axis control.. 333
13.1 Removing and replacing the BoxPC.. 333
13.1.1 Preparatory tasks.. 333
13.1.1.1 Data backup.. 333
13.1.1.2 Preparing the SWS.. 333
13.1.2 Preparing removal of the BoxPC.. 334
13.1.2.1 Cable connections on the back of the BoxPC.. 335
13.1.3 Removing the BoxPC.. 338
13.1.4 Fitting the new BoxPC.. 339
13.1.4.1 Connecting the new BoxPC.. 340
13.1.4.2 Final work after installation.. 340
13.2 GALIL cards in the BoxPC.. 341
13.2.1 General information about the GALIL cards.. 341
13.2.2 Replacing the GALIL card.. 343
13.3 Replacing the servo amplifier for the axes.. 346
13.3.1 Removing the servo amplifier AMP-19540 from the SWS frame.. 347
13.3.2 GALIL AMP-19540 in detail.. 351
13.3.3 Fitting the servo amplifier AMP-19540 in the SWS frame.. 353
14 Settings and tests.. 357
14.1 SWS GUI - service settings.. 357
14.2 Manual settings.. 358
14.3 Camera calibration.. 359
15 Calibration.. 361
15.1 General information.. 361
15.2 Activation of setup operation at the SWS (hard and software).. 361
15.2.1 Precondition.. 361
15.2.2 Concept of retrofit for setup operation.. 362
15.2.3 Preparation of the software.. 363
15.2.4 Changing the cables at the mounting plate to allow for setup mode.. 364
15.2.5 Rules for the Setup mode - safety relevant issue!.. 368
15.3 Calibration die handling - flip unit.. 368
15.3.1 Preparation – adjusting the holding cylinder Z axis.. 368
15.3.1.1 Different locking systems for the holding cylinder.. 369
15.3.1.2 Adjustment of the holding cylinder Z axis.. 371
15.3.2 Calibration of the SWS – flip head.. 373
15.3.2.1 Entering calibration menu – flip head.. 373
15.3.2.2 Calibration – flip head rotation axis.. 374
15.3.2.3 Calibration – flip head Z axis.. 376
15.3.2.4 Calibration – segment offset calibration in X direction.. 379
15.3.2.5 Calibration – die ejector needle.. 385
15.3.2.6 Calibration – calibration station (not used on SWS).. 389
9Service Manual SIPLACE Wafer System (SWS) 11/2018
15.4 Calibration of the complete wafer handling.. 389
15.4.1 Calibrating the wafer lift.. 390
15.4.1.1 Calibrating the magazine lift limit positions.. 390
15.4.1.2 Calibrating the magazine slot scan position.. 391
15.4.1.3 Calibrating the wafer transfer position of the magazine with respect to the wafer table.. 394
15.4.1.4 Calibrating the wafer lift position – magazine change position.. 397
15.4.2 Wafer table calibration menu.. 398
15.4.2.1 Wafer table calibration.. 398
15.4.2.2 Wafer table positions.. 399
15.4.3 Calibration wafer changer menu.. 405
15.5 SWS data backup and restore.. 408
15.5.1 Machine data.. 408
15.5.2 Product data.. 409
16 Software.. 411
16.1 General information.. 411
16.1.1 Brief description.. 411
16.1.2 Scope of delivery.. 411
16.1.2.1 SWS software package.. 411
16.1.2.2 SWS operating system package.. 411
16.2 Installation of operating system.. 412
16.2.1 Backup of installed software.. 412
16.2.1.1 Backup of calibration and product data via GUI.. 412
16.2.1.2 Backup of Halcon license.. 416
16.2.1.3 Backup of Halcon license via Linux console... 416
16.2.1.4 Restoring the Halcon license via the GUI.. 419
16.2.1.5 Backup of installed SWS software via Linux console.. 421
16.2.1.6 Backup via bug report.. 424
16.2.1.7 Creating a recovery DVD for restoring the system.. 427
16.2.1.8 Restoring the system with the recovery DVD.. 432
16.2.1.9 Adding network addresses.. 433
16.2.2 Installation of operating system.. 436
16.2.2.1 Completing backup of the installed version first.. 437
16.2.2.2 Installing the GUI.. 438
16.2.3 Restoring the data.. 442
16.2.3.1 Restoring the Halcon license.. 442
16.2.3.2 Selecting the SWS location.. 444
16.2.3.3 Restoring the network addresses.. 447
16.2.3.4 Restoring the process data via the GUI.. 458
16.2.3.5 Restoring the calibration data via the GUI.. 460
16.2.3.6 Restoring the backup via the Linux console.. 462
16.2.3.7 Restoring the data from a bug report.. 465
16.2.4 Calibrating the touchscreen.. 465
16.3 Installing a new software version (GUI).. 466
16.4 Restoring an old software version (GUI).. 466
17 Tips and tricks.. 471
17.1 Moving the Z axis for die ejector downwards in the switched off and removed
SWS..
471
17.2 Wafer changer calibration problems.. 474
17.3 Wafers are recognized in the wrong slot of the magazine.. 476