00195982-03_SM_SWS_EN.pdf - 第481页

18 Appendix 18.2 Specification: power supply Service Manual SIPLACE Wafer System (SWS) 11/2018 481 18.2.2 General structure of power supply The factory set option for electrical energy (a.c. current, without N) is suppli…

18 Appendix

18.2 Specification: power supply

480 Service Manual SIPLACE Wafer System (SWS) 11/2018

18.1.5 Emergency STOP extension on the SIPLACE

Location 1, connector X113

Location 3, connector X133

Missing signals:

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Pin-5 = SWS emergency STOP loop output

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Pin-6 = SWS emergency STOP loop input

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Pin-9 = emergency STOP message SWS to SIPLACE > input

The die feeder or MTC is unable to receive an emergency STOP signal form the SIPLACE at loca-

tions 1 and 3.

The external emergency STOP loop is missing.

The emergency STOP message (internal query) for the SIPLACE is missing from location 1 and 3.

Action:

The emergency STOP loop in the SIPLACE is extended for locations 1 and 3 with the

3TK2830-1CB30 switching device.

The electrical circuit diagram can be found in the document no.: "EMG_SIPLACE".

Optional:

Many versions of the SIPLACE from 2005-2007 featured a double emergency STOP loop with

AND connection, integrated with the presence signal output 16, X1x3 pin7. The following signals

must be disconnected from the boards:

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M_component table 1 = board A5/X1re-pin3

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M_component table 4 = board A5/X1re-pin7

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M_component table 2 = board A5/X1qe-pin3

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M_component table 3 = board A5/X1qe-pin7

These inputs must then be run with 24V to the boards pin3/pin7, coming from the terminal strip

X1ra or X1qa.

18.2 Specification: power supply

18.2.1 Supply and switching elements

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3-phase mains filter EPCOS type B84143-A08-R000 480/265VAC, 50/60Hz, 8A

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1 main switch 3 pin, 16A, 3LD2003-0TK53

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1 circuit breaker 3 pin, 3RV1421-1JA10, setting of 7-10A

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3-phase rectifier unit type 4AV3596-0EC40-0A 690VA, degree of protection: IP00

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1 circuit breaker 1 pin, 5SY2102/C/2A for 24VDC monitor

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1 circuit breaker 2 pin, 5SY6204/C/4A for 230VAC computer

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1 circuit breaker 1 pin, 5SY2102/C/2A for 24VDC monitor

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1 circuit breaker 1 pin, 5SY2102/C/6A for 24VDC control

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1 circuit breaker 1 pin, 5SY2102/D/13A for 48VDC driver

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2 circuit breakers 3 pin K1/K2 coil 24VDC / switching capacity 11KW / 25 A

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2 additional units 1S/1Ö with mechanical coupling at K1/K2

18 Appendix

18.2 Specification: power supply

Service Manual SIPLACE Wafer System (SWS) 11/2018 481

18.2.2 General structure of power supply

The factory set option for electrical energy (a.c. current, without N) is supplied in the back substruc-

ture (welded frame) and fed through a PG13 screwed connection directly to the mains filter Z1.

The PE (earth potential) is directly connected to the welded frame (M5 ring cable lug) and then to

the mains filter.

The infeed cable (4x2.5 mm²) via the filter to the main switch Q1 has a yellow shielded labeling.

The main switch 3x16A (yellow substructure with red rotary switch) is attached to the side panel

(right or left) of the wafer lift for good access.

The infeed for the switchboard, coming from the main switch, is run to terminal X1. The switch-

board features the fuse Q2 for the 3-phase rectifier unit T1.

The computer and the fuses Q1/ F1-F4 on the switchboard can be accessed via the bottom wafer

lift door.

By folding up the wafer lift and pushing the switchboard 50 cm out, you can also access the AMP

motor amplifier, the IO board and the vacuum pump.

18.2.3 Transformer T1 with rectification and connections

3-phase transformer with downstream integrated rectifier for 24VDC and 48VDC.

Type: 4AV3596-0EC40-0A, capacity: 690VA, degree of protection: IP00, insulation class: T60/B

Structure

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Input voltage: 415 / 400 / 380 / 230 / 204VAC, 50/60Hz,

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Output voltage/current: 230VAC/3A, 48VDC/13A, 24VDC/8A

●

With 2x 2 pin circuit breakers between the secondary winding and the rectification.

For 24VDC = circuit breaker 5SY62/D8A

For 48VDC = circuit breaker 5SY62/D20A

Infeed

The infeed (3-phase a.c. current) is designed for five different mains voltages and is to be connec-

ted to the relevant terminals (labeled with voltages 415 / 400 / 380 / 230 / 204V). The input

voltages 200VAC (USA) and 210VAC (Japan) are to be connected to the 204V terminals.

The upstream overcurrent circuit breaker Q2 is to be set to a minimum of 6A trip current. When us-

ing the machine option with wafer heater, Q2 is to be set to 10A trip current.

Pickoff 230 VAC

The output voltage 230VAC/3A (primary pickoff T1 at terminal 230V and 0V) is only used for the

computer power pack. The computer power pack is secured with the circuit breaker F1 (4 A / 2

pin).

The computer mains voltage 230V is present when the main switch Q1 is switched on.

Pickoff 3x230VAC (for the wafer heater option)

The output voltage 3x230VAC (primary pickoff T1 at terminal 3x230V) is used for the wafer heat-

ing. The control has a modular design for retrofitting and is secured with the circuit breaker F5 (10

A / 3 pin).

The consumers are two heating coils, each with 1000W and a cross-current fan with 23 W.

18 Appendix

18.3 Specification: motor control

482 Service Manual SIPLACE Wafer System (SWS) 11/2018

Pickoff 24VDC, idle approx. 26VDC

The output voltage 24 VDC / 8 A (2 pin circuit breaker 8A between alternating voltage and rectific-

ation) supplies the monitor and the control voltage for actuators and sensors.

The monitor voltage is secured with the circuit breaker F2 (2 A / 1 pin) and is present when the

main switch is switched on.

The control voltage is secured with the circuit breaker F3 (6 A / 1 pin) and is present at terminals

X3-1..8 = GND and X3-13..16 = 24 V when the main switch is switched on.

24V/F3 voltage is provided for drives with emergency STOP function, via the upstream contactors

K1/K2 and is available at terminal X3-17.

The 24V GND potential is connected to ground via terminals X3-8 and 9.

Pickoff 48VDC, idle approx. 50VDC

The output voltage 48 VDC / 13 A (2 pin circuit breaker 20A between alternating voltage and recti-

fication) supplies the three AMP-19540(20) amplifiers for the downstream servo motors.

The 48 VDC voltage is secured with the circuit breaker F4 (13A/1 pin) and made available via the

upstream contactors K1/K2 in series, at terminal X2-6/7.

The 48 DC voltage for the emergency STOP function is switched off via the contactors K1 and K2.

18.3 Specification: motor control

18.3.1 Motor control concept

The motor control system consists of a Galil motor controller DMC-18x6 (PCI-BUS) and the Galil

servo amplifier AMP-19540(20).

It has a modular structure, designed for modular machine placement.

In the minimum machine placement setup, with no die attach unit or wafer handler, six servo mo-

tors are used.

The maximum machine placement setup uses ten servo motors.

18.3.1.1 Motor control placement variants

Placement 1: without die attach unit, without wafer handler

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1x motor controller DMC-1866 (6 axes)

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1x servo amplifier AMP-19540 (4 axes)

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1x servo amplifier AMP-19520 (2 axes)

Placement 2: with die attach unit, without wafer handler

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1x motor controller DMC-1886 (8 axes)

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2x servo amplifier AMP-19540 (4 axes)

Placement 3: without die attach unit, with wafer handler

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1x motor controller DMC-1866 (6 axes)

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1x motor controller DMC-1826 (2 axes)

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1x servo amplifier AMP-19540 (4 axes)

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2x servo amplifier AMP-19520 (2 axes)