00195982-03_SM_SWS_EN.pdf - 第480页
18 Appendix 18.2 Specification: power supply 480 Service Manual SIPLACE Wafer System (SWS) 11/2018 18.1.5 Emergency STOP extension on the SIPLACE Location 1 , connector X113 Location 3 , connector X133 Missing signals: ●…
18 Appendix
18.1 Specification: emergency STOP
Service Manual SIPLACE Wafer System (SWS) 11/2018 479
Resetting emergency OFF
1. The emergency STOP mushroom-head pushbutton first needs to be unlocked (rotary re-
lease).
The signal message (IN1 = emergency STOP button) will be one.
The emergency STOP loop of the SIPLACE needs to be closed. The cover is closed, the start
button pressed and then the IN16 is one.
2. After recognizing the run readiness of the die feeder (IN1 = 1, IN16 = 1), the relay start K4
(OUT1>150ms) will be switched on/off.
The emergency STOP switching device K3 will be enabled and will switch the contactors K1/
K2 on.
Case 2: emergency STOP with mushroom-head pushbutton for SIPLACE or
SIPLACE cover opened
The emergency STOP loop for the SIPLACE will be interrupted and then switches the emergency
STOP switching device for the SIPLACE off. The emergency STOP loop for the SWS will be inter-
rupted via the emergency STOP switching device for the SIPLACE.
The SWS power contactors K1/K2 will be switched off via the emergency STOP switching device
with delay (500ms).
The signal message IN16 will then immediately become zero (signal message IN1 stays one). The
operational readiness lamp (white) will be switched off.
Resetting emergency OFF
The emergency STOP loop for the SIPLACE needs to be closed, the emergency STOP button dis-
abled, the cover closed, the start button pressed and then the IN16 will become one.
After recognizing the run readiness of the die feeder (IN1 = 1, IN16 = 1), the relay start K4
(OUT1>150ms) will be switched on/off.
The emergency STOP switching device K3 will be enabled and will switch the contactors K1/K2
on.
Case 3: emergency STOP function for SWS when taking into operation without the
SIPLACE
NOTICE
Only for SIPLACE service personnel, external service box is connected, connector X1x3.
Taking the SWS into operation (without SIPLACE) involves simulating the external emergency
STOP function via the service box.
The internal and external emergency STOP functions (service box) will be kept.
When the start button (service box) is pressed, the relay (latching function) will close the internal
emergency STOP loop. The two emergency STOP buttons (internal and external need to be un-
locked in advance.
After recognizing the closed emergency STOP loop for the die feeder (IN1 = 1, IN16 = 1), the relay
start K4 (OUT1>150ms) will be switched on/off.
The emergency STOP switching device K3 will be enabled and will switch the contactors K1/K2
on.
When the emergency STOP is pressed (internal or external emergency STOP button) the contact-
ors K1/K2 will switch off with a 500ms delay.
18 Appendix
18.2 Specification: power supply
480 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.1.5 Emergency STOP extension on the SIPLACE
Location 1, connector X113
Location 3, connector X133
Missing signals:
●
Pin-5 = SWS emergency STOP loop output
●
Pin-6 = SWS emergency STOP loop input
●
Pin-9 = emergency STOP message SWS to SIPLACE > input
The die feeder or MTC is unable to receive an emergency STOP signal form the SIPLACE at loca-
tions 1 and 3.
The external emergency STOP loop is missing.
The emergency STOP message (internal query) for the SIPLACE is missing from location 1 and 3.
Action:
The emergency STOP loop in the SIPLACE is extended for locations 1 and 3 with the
3TK2830-1CB30 switching device.
The electrical circuit diagram can be found in the document no.: "EMG_SIPLACE".
Optional:
Many versions of the SIPLACE from 2005-2007 featured a double emergency STOP loop with
AND connection, integrated with the presence signal output 16, X1x3 pin7. The following signals
must be disconnected from the boards:
●
M_component table 1 = board A5/X1re-pin3
●
M_component table 4 = board A5/X1re-pin7
●
M_component table 2 = board A5/X1qe-pin3
●
M_component table 3 = board A5/X1qe-pin7
These inputs must then be run with 24V to the boards pin3/pin7, coming from the terminal strip
X1ra or X1qa.
18.2 Specification: power supply
18.2.1 Supply and switching elements
●
3-phase mains filter EPCOS type B84143-A08-R000 480/265VAC, 50/60Hz, 8A
●
1 main switch 3 pin, 16A, 3LD2003-0TK53
●
1 circuit breaker 3 pin, 3RV1421-1JA10, setting of 7-10A
●
3-phase rectifier unit type 4AV3596-0EC40-0A 690VA, degree of protection: IP00
●
1 circuit breaker 1 pin, 5SY2102/C/2A for 24VDC monitor
●
1 circuit breaker 2 pin, 5SY6204/C/4A for 230VAC computer
●
1 circuit breaker 1 pin, 5SY2102/C/2A for 24VDC monitor
●
1 circuit breaker 1 pin, 5SY2102/C/6A for 24VDC control
●
1 circuit breaker 1 pin, 5SY2102/D/13A for 48VDC driver
●
2 circuit breakers 3 pin K1/K2 coil 24VDC / switching capacity 11KW / 25 A
●
2 additional units 1S/1Ö with mechanical coupling at K1/K2
18 Appendix
18.2 Specification: power supply
Service Manual SIPLACE Wafer System (SWS) 11/2018 481
18.2.2 General structure of power supply
The factory set option for electrical energy (a.c. current, without N) is supplied in the back substruc-
ture (welded frame) and fed through a PG13 screwed connection directly to the mains filter Z1.
The PE (earth potential) is directly connected to the welded frame (M5 ring cable lug) and then to
the mains filter.
The infeed cable (4x2.5 mm²) via the filter to the main switch Q1 has a yellow shielded labeling.
The main switch 3x16A (yellow substructure with red rotary switch) is attached to the side panel
(right or left) of the wafer lift for good access.
The infeed for the switchboard, coming from the main switch, is run to terminal X1. The switch-
board features the fuse Q2 for the 3-phase rectifier unit T1.
The computer and the fuses Q1/ F1-F4 on the switchboard can be accessed via the bottom wafer
lift door.
By folding up the wafer lift and pushing the switchboard 50 cm out, you can also access the AMP
motor amplifier, the IO board and the vacuum pump.
18.2.3 Transformer T1 with rectification and connections
3-phase transformer with downstream integrated rectifier for 24VDC and 48VDC.
Type: 4AV3596-0EC40-0A, capacity: 690VA, degree of protection: IP00, insulation class: T60/B
Structure
●
Input voltage: 415 / 400 / 380 / 230 / 204VAC, 50/60Hz,
●
Output voltage/current: 230VAC/3A, 48VDC/13A, 24VDC/8A
●
With 2x 2 pin circuit breakers between the secondary winding and the rectification.
For 24VDC = circuit breaker 5SY62/D8A
For 48VDC = circuit breaker 5SY62/D20A
Infeed
The infeed (3-phase a.c. current) is designed for five different mains voltages and is to be connec-
ted to the relevant terminals (labeled with voltages 415 / 400 / 380 / 230 / 204V). The input
voltages 200VAC (USA) and 210VAC (Japan) are to be connected to the 204V terminals.
The upstream overcurrent circuit breaker Q2 is to be set to a minimum of 6A trip current. When us-
ing the machine option with wafer heater, Q2 is to be set to 10A trip current.
Pickoff 230 VAC
The output voltage 230VAC/3A (primary pickoff T1 at terminal 230V and 0V) is only used for the
computer power pack. The computer power pack is secured with the circuit breaker F1 (4 A / 2
pin).
The computer mains voltage 230V is present when the main switch Q1 is switched on.
Pickoff 3x230VAC (for the wafer heater option)
The output voltage 3x230VAC (primary pickoff T1 at terminal 3x230V) is used for the wafer heat-
ing. The control has a modular design for retrofitting and is secured with the circuit breaker F5 (10
A / 3 pin).
The consumers are two heating coils, each with 1000W and a cross-current fan with 23 W.