00195982-03_SM_SWS_EN.pdf - 第358页
14 Settings and tests 14.2 Manual settings 358 Service Manual SIPLACE Wafer System (SWS) 11/2018 Main vacuum control system Fig.512: SWS GUI - motor settings 14.2 Manual settings Fig.513: SWS GUI - manual settings ► Se…
14 Settings and tests
14.1 SWS GUI - service settings
Service Manual SIPLACE Wafer System (SWS) 11/2018 357
14 Settings and tests
14.1 SWS GUI - service settings
Fig.510: SWS GUI - service settings menu
► Select the (1) Service Settings button.
► Select Motor settings (2) or Main vacuum control system (3).
Motor settings
Fig.511: SWS GUI - motor settings
► Select the relevant assembly (1) to move the motor concerned and to view the corresponding
status of the axes or end position switches.
The information for each assembly is available in the tabs:
●
Axis status
●
Parameters - control unit
●
Other
●
Statistics
14 Settings and tests
14.2 Manual settings
358 Service Manual SIPLACE Wafer System (SWS) 11/2018
Main vacuum control system
Fig.512: SWS GUI - motor settings
14.2 Manual settings
Fig.513: SWS GUI - manual settings
► Select the (1) Manual Settings button.
► Select Manual Subsystems (2) and then IOs (3).
14 Settings and tests
14.3 Camera calibration
Service Manual SIPLACE Wafer System (SWS) 11/2018 359
IOs
Fig.514: SWS GUI - Manual Settings - Manual Subsystems
1. Manual settings
2. IOs
3. Subsystem tabs
14.3 Camera calibration
Fig.515: SWS GUI - service menu
► Go to the toolbar and select the button Service
(1) and then Die handling calibration (2).