00195982-03_SM_SWS_EN.pdf - 第363页
15 Calibration 15.2 Activation of setup operation at the SWS (hard and software) Service Manual SIPLACE Wafer System (SWS) 11/2018 363 15.2.3 Preparation of the software To get access to the mounting plate for enabling t…
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
362 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.2.2 Concept of retrofit for setup operation
4-pole
4-pole
4-pole 4-pole4-pole
4-pole
4-pole
Amplifier
The cabling is added.
In setup mode, the safety circuit is closed either
via the motor windings or via a separate
connector that comprises all the amplifier
connectors. If the motors are connected to the
amplifier, the setup mode is no longer possible
because the connectors are occupied in that
case.
4-pole4-pole 4-pole
4-pole4-pole
The motor cables can remain unchanged.
Mounting plate
Wafer
table
motors
X Y
Fig.518:
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
Service Manual SIPLACE Wafer System (SWS) 11/2018 363
15.2.3 Preparation of the software
To get access to the mounting plate for enabling the setup mode, the magazine lift must be in the
magazine change position.
The following steps must be performed:
Fig.519:
► Choose Settings (1).
► Choose User Settings (2).
► Choose Machine Service (3).
► Enter the password (4) for the access level Machine Service → service1
► Choose Login (5).
Fig.520:
► Choose Service (6).
► Choose Calibration of wafer changer (7).
15 Calibration
15.2 Activation of setup operation at the SWS (hard and software)
364 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.521:
► Choose Calibration wafer lift (8).
► Choose the Positions tab (9).
► Choose Go to position (10) to move the lifting table to the magazine change position.
15.2.4 Changing the cables at the mounting plate to allow for setup mode
Tools required
●
Machine key
●
Allen key 5mm
Procedure
► Open the front door of the magazine lift by using the machine key!
Fig.522:
► Open the tower lock screw (2) by using the Allen key 5mm (the screw has a lost protection).