00195982-03_SM_SWS_EN.pdf - 第375页

15 Calibration 15.3 Calibration die handling - flip unit Service Manual SIPLACE Wafer System (SWS) 11/2018 375 How Automatic calibration for the flip head rotation axis works ► The flip rotation axis is referenced. ► The…

15 Calibration

15.3 Calibration die handling - flip unit

374 Service Manual SIPLACE Wafer System (SWS) 11/2018

15.3.2.2 Calibration – flip head rotation axis

NO RISK OF SERIOUS INJURIES

► Setup mode not activated!

Machine covers are closed!

This calibration detects the zero point of the flip head rotation axis.

After this calibration, the ball bearing of the Z axis is positioned exactly in the center of the Z axis

actuator!

Fig.536:

► Choose Service calibration flipper on the right menu bar.

Usually, this button is active when you enter this menu.

Fig.537:

► Choose Calibration for the flip head rotation axis (1).

► Choose Start calibration (2).

ð The automatic calibration sequence starts.

► During the calibration, the status Execute is active (3).

► After successful calibration, the status changes to Ready.

15 Calibration

15.3 Calibration die handling - flip unit

Service Manual SIPLACE Wafer System (SWS) 11/2018 375

How Automatic calibration for the flip head rotation axis works

► The flip rotation axis is referenced.

► The flip Z axis is moved down by 3mm. In that case, the Z position defined by the holding cyl-

inder will be used as the home position of the Z axis because the Z axis is possibly not calib-

rated at this point.

Fig.538:

► The flip rotation axis is moved until there is a time-out by touching the Z axis actuator with the

bearing of one segment. This position of the rotation axis saved.

Fig.539:

► After that, the rotation axis moves in the opposite direction, until the Z axis actuator is touched

by the bearing of the other segment. This position is also saved.

► From these two positions of the flip rotation axis, the average value is calculated and thus the

home position of flip rotation is defined.

15 Calibration

15.3 Calibration die handling - flip unit

376 Service Manual SIPLACE Wafer System (SWS) 11/2018

15.3.2.3 Calibration – flip head Z axis

NO RISK OF SERIOUS INJURIES

► Setup mode not activated!

Machine covers are closed!

This calibration detects the correct zero point of the flip head Z axis with respect to the raceway of

the flip head rotation axis.

After the calibration, the actuator of the flip head Z axis is exactly positioned with respect to the

raceway, so that there is no effect on the Z axis during the rotation and there is finally no deviation

of the ball bearing!

Fig.540:

► Choose Service Calibration Z axis on the right menu bar.

Fig.541:

► Choose Start Calibration.

ð The complete automatic calibration of the Z axis starts.

► During the automatic calibration, the status Execute is active.