00195982-03_SM_SWS_EN.pdf - 第355页

13 BoxPC, GALIL cards and axis control 13.3 Replacing the servo amplifier for the axes Service Manual SIPLACE Wafer System (SWS) 11/2018 355 Fig.509: ► Reestablish all cable connections on the GALIL card. All cables hav…

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

354 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.507:

► Screw the four fastening screws and their washers into the four holes provided.

► Use the paper to fix the screws onto the Allen key.

► Tighten the four screws.

Fig.508:

► Reestablish the ground connection.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

Service Manual SIPLACE Wafer System (SWS) 11/2018 355

Fig.509:

► Reestablish all cable connections on the GALIL card.

All cables have the same designation label as the connections on the GALIL card.

► Check whether all cables are connected properly.

Pay particular attention to the 100-pin J1 AXIS1-4 cable, which needs a good connection, oth-

erwise this could cause problems.

► If the vacuum pump and the protective bracket have been removed to give better access to

the GALIL card: refit the vacuum pump and the protective bracket and reestablish the connec-

tion to the SWS.

► Now, or before assembly of the vacuum pump, push the side cover plate back into the SWS

and fix the side cover plate into place with the two screws.

► Complete the SWS.

► Refit the side cover.

► Swivel the wafer lift back into place.

► Refit the SWS in the machine.

ð The SWS should function again without the need for calibration.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

356 Service Manual SIPLACE Wafer System (SWS) 11/2018