00195982-03_SM_SWS_EN.pdf - 第181页
8 Flip unit 8.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 181 Fig.234: Removing the wafer camera ► Remove the two screws (1) holding the wafer camera. The three screws fastening the camera …
8 Flip unit
8.3 Replacing spare parts
180 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.3.4 Removing the wafer camera on the flip unit
Fig.233: Wafer camera – flat ribbon cable and camera connector
NOTICE
Only replace the wafer camera as a whole
The wafer camera with holder bracket may only be replaced as a whole unit. The three
screws fastening the camera (4) are sealed and may not be loosened.
► Remove the cover from the flip unit.
► Remove the reject bin and the cable cover underneath (1), including screws.
► Pull the two flat ribbon cables off the USB board (2). Pay attention how the flat ribbon cables
are run from the USB board to the wafer camera.
Connection no. 1 is for the bright field board, connection no. 2 for the dark field board.
► Remove the camera connector (3) with the three fastening screws. The central one is still
clamping a shield into place.
8 Flip unit
8.3 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 181
Fig.234: Removing the wafer camera
► Remove the two screws (1) holding the wafer camera. The three screws fastening the camera
(3) are sealed and may not be loosened.
► Pull the camera up and off. The camera is positioned on two locating pins (2).
► Insert the new wafer camera and fix it with the two screws which you removed before.
► Fit the camera connector. The central screw on the camera connector is still clamping a shield
into place.
► Connect connections 1 and 2 to the USB board.
► Thread in the two flat ribbon cables again (connections 1 and 2) and connect these to the
USB board. Make sure that the contacts are at the bottom.
8.3.4.1 Replacing the bright field illumination board
Fig.235: Replacing the bright field illumination board
► Remove the cover (1) with the four fastening screws.
► Remove the two screws on the board (2). Pay attention to the diffusing plate below.
► Pull the flat ribbon cable off the board (2).
► Fit the new board.
8 Flip unit
8.3 Replacing spare parts
182 Service Manual SIPLACE Wafer System (SWS) 11/2018
8.3.4.2 Replacing the dark field illumination board
Fig.236: Replacing the dark field illumination board
► Dismantle the wafer camera so you can place it down when turned over (see8.3.4 "Removing
the wafer camera on the flip unit" [}180]).
CAUTION
Do not touch the prism mirror
The prism mirror (3) should not be touched.
► If the prism mirror is dirty, clean it with a lint-free cloth.
► Remove the four screws on the cover plate (1).
► Remove the two screws fastening the dispersion plate (2) and then lift off the dispersion plate.
► Remove the two screws on the board.
► Pull the flat ribbon cable off the board.
► Fit the new board.