00195982-03_SM_SWS_EN.pdf - 第143页

7 Die ejector 7.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 143 Fig.174: ► Thread the base plate in and position it on the SWS plate. Make sure that it does not bump against anything. Fig.…

7 Die ejector

7.3 Replacing spare parts

142 Service Manual SIPLACE Wafer System (SWS) 11/2018

7.3.5 Fitting the complete die ejector unit into the SWS

Preconditions

●

SWS removed from machine

●

SWS disconnected from the power supply

Procedure

To fit the complete die ejector unit into the SWS, follow the removal instructions in reverse order

(see 7.3.2 "Removing the complete die ejector unit from the SWS" [}122]).

Fig.173:

► Insert the base plate into the SWS. Make sure that the recess for the omega spring(1) is al-

ways at the front.

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 143

Fig.174:

► Thread the base plate in and position it on the SWS plate. Make sure that it does not bump

against anything.

Fig.175:

► Place the base plate down on the SWS plate (2). The die ejector recess (3) points in the direc-

tion of the wafer lift.

7 Die ejector

7.3 Replacing spare parts

144 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.176: Die ejector (example of SWS 2/4 shown)

► Insert the left hand into the die ejector recess, lift it gently and put the right hand under the

front side.

The diagram is for a die ejector with an SWS 2/4.

When using an SWS 1/3, you need to insert the right hand into the recess and hold the front

side with the left hand.

SWS 2/4

Fig.177:

► Lift the base plate slightly and turn this by approx. 90° to the left (anticlockwise).

► Carefully lower the base plate.