00195982-03_SM_SWS_EN.pdf - 第77页

5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 77 Fig.59: ► Remove the coupling clamping screw for the motor shaft. You might need to widen the coupling clamp with a screw…

5 Basic frame – X/Y unit

5.3 Replacing parts

76 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.57:

► Remove the clamping screw for the coupling shown in the diagram!

Fig.58:

► Carefully pull the whole coupling plate-motor-coupling unit off the spindle.

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 77

Fig.59:

► Remove the coupling clamping screw for the motor shaft.

You might need to widen the coupling clamp with a screwdriver.

► Pull the coupling off the motor shaft.

Fig.60:

► Remove the four screws fastening the motor to the coupling plate.

5 Basic frame – X/Y unit

5.3 Replacing parts

78 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.61:

The Y motor and coupling plate are now separate.

Pay attention to the position.