00195982-03_SM_SWS_EN.pdf - 第98页

5 Basic frame – X/Y unit 5.3 Replacing parts 98 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.99: ► Wire the Hall sensor cable and power supply cable to the X motor. Pay attention to the correct wiring (see 5.3.…

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 97

Fig.97:

► Lift the cable downholder over the shielded cable and carefully tighten the screw with the ball

head of the Allen key.

The cable should be aligned parallel to the X axis.

Fig.98:

► As shown in the diagram above, run the cable without twisting!

5 Basic frame – X/Y unit

5.3 Replacing parts

98 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.99:

► Wire the Hall sensor cable and power supply cable to the X motor.

Pay attention to the correct wiring (see 5.3.2.1 "Removing the X motor and coupling" [}85]).

► Connect the flat ribbon cable to the encoder.

Fig.100:

► Position the cable and fix it into place with a cable downholder.

► Screw the cable downholder into place. Make sure that you do not squash any cables!

5 Basic frame – X/Y unit

5.3 Replacing parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 99

Fig.101:

► Fasten the second downholder into place.

Fig.102:

► Fasten the flat ribbon cable to the cables with cable ties.