00195982-03_SM_SWS_EN.pdf - 第145页

7 Die ejector 7.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 145 SWS 1/3 Fig.178: ► Lift the base plate slightly and turn this by approx. 90° to the right (clockwise). ► Carefully lower the …

7 Die ejector

7.3 Replacing spare parts

144 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.176: Die ejector (example of SWS 2/4 shown)

► Insert the left hand into the die ejector recess, lift it gently and put the right hand under the

front side.

The diagram is for a die ejector with an SWS 2/4.

When using an SWS 1/3, you need to insert the right hand into the recess and hold the front

side with the left hand.

SWS 2/4

Fig.177:

► Lift the base plate slightly and turn this by approx. 90° to the left (anticlockwise).

► Carefully lower the base plate.

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 145

SWS 1/3

Fig.178:

► Lift the base plate slightly and turn this by approx. 90° to the right (clockwise).

► Carefully lower the base plate.

Fig.179: SWS base plate

7 Die ejector

7.3 Replacing spare parts

146 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.180:

► Insert the four screws fastening the base plate.

Only tighten these screws slightly to begin with, so that the base plate remains flexible for ad-

justing its alignment.

The two rear screws (towards the wafer lift) are difficult to access.

Fig.181:

► Insert the omega spring. The hole (4) drilled in the omega spring is guided onto the holder

pin(5) in the recess.