00195982-03_SM_SWS_EN.pdf - 第392页

15 Calibration 15.4 Calibration of the complete wafer handling 392 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.569: ► Choose Go to position next to Slot scan position . Fig.570: ► The magazine plate should no…

15 Calibration

15.4 Calibration of the complete wafer handling

Service Manual SIPLACE Wafer System (SWS) 11/2018 391

Fig.567:

► Choose Calibrate magazine lift limits.

ð The lifting axis detects the upper (forward) and lower (reverse) limit switches of the lift axis.

15.4.1.2 Calibrating the magazine slot scan position

The slot scan sensor detects if there is a wafer frame inside the magazine for each slot.

The magazine is scanned each time if one of the following conditions is true:

●

A new magazine is inserted into the wafer lift.

●

The system has been initialized and a magazine is present inside the lift.

●

In the Products view, Scan magazine is selected.

Fig.568:

► Choose Calibrate wafer presence sensor, to calibrate the position of the wafer presence

sensor with respect to the magazine.

ð The calibration sequence runs automatically.

ð The lifting axis is moved until the magazine plate activates the slot scan sensor. From this

position, the final position for the slot scan sensor is calculated.

► Choose the Position tab, to check whether the calibrated position is correct.

15 Calibration

15.4 Calibration of the complete wafer handling

392 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.569:

► Choose Go to position next to Slot scan position.

Fig.570:

► The magazine plate should now activate the slot sensor (see the figures).

► The LED must be on (2).

15 Calibration

15.4 Calibration of the complete wafer handling

Service Manual SIPLACE Wafer System (SWS) 11/2018 393

Fig.571:

► If the sensor is off ((1) in figure above), the position of the magazine plate can be moved with

the arrows keys (see figure above).

► Before moving up or down, choose the step increment (e.g. 100µm).

► Move the lifting axis up until the LED of the sensor is on.

ð The last step before the LED switches to on should not be greater than 100µm.

► Once the correct position is determined, choose Save next to Slot scan position.

NOTICE

If you are using 12” wafers, the frames possibly sag up to 500µm. If you are facing prob-

lems when changing 12" wafers, correct the slot scan position by about 500µm upward.