00195982-03_SM_SWS_EN.pdf - 第39页

2 Overview of the SIPLACE wafer system (SWS) 2.4 Description of SWS assemblies Service Manual SIPLACE Wafer System (SWS) 11/2018 39 Wafer changer There are two different versions of the wafer changer. The version availab…

2 Overview of the SIPLACE wafer system (SWS)

2.4 Description of SWS assemblies

38 Service Manual SIPLACE Wafer System (SWS) 11/2018

Magazine lift

Fig.19: Magazine lift

1. Magazine unit with adjustable changer plate for accommodating 8" and 12 " magazine cas-

settes

2. Motor

3. Wafer changer with cover

2 Overview of the SIPLACE wafer system (SWS)

2.4 Description of SWS assemblies

Service Manual SIPLACE Wafer System (SWS) 11/2018 39

Wafer changer

There are two different versions of the wafer changer. The version available depends on the loca-

tion (2/4 or 1/3).

Fig.20: Main gripper assemblies (location 2/4)

1. Gripper

2. Toothed belt axis

3. Installation location for barcode scanner (optional)

4. AD-MOT board under the cover

5. Motor with coupling

2 Overview of the SIPLACE wafer system (SWS)

2.4 Description of SWS assemblies

40 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.21: Main gripper assemblies (location 1/3)

1. Gripper

2. Toothed belt axis

3. Installation location for barcode scanner (optional)

4. AD-MOT board

5. Motor with coupling