00195982-03_SM_SWS_EN.pdf - 第409页

15 Calibration 15.5 SWS data backup and restore Service Manual SIPLACE Wafer System (SWS) 11/2018 409 15.5.2 Product data Fig.600: The product data comprise the data of all the customer products and production processes…

15 Calibration

15.5 SWS data backup and restore

408 Service Manual SIPLACE Wafer System (SWS) 11/2018

15.5 SWS data backup and restore

15.5.1 Machine data

Fig.598:

The machine data comprise the calibration data of all machine sub systems.

► With Archive machine data… you can save these data to a flash drive.

Fig.599:

► To restore the backup choose Restore machine data….

► Plug in the flash drive and select the desired backup file.

► Choose Start.

15 Calibration

15.5 SWS data backup and restore

Service Manual SIPLACE Wafer System (SWS) 11/2018 409

15.5.2 Product data

Fig.600:

The product data comprise the data of all the customer products and production processes.

► With Archive product data… you can save these data to a flash drive.

Fig.601:

► To restore the backup choose Restore product data….

► Plug in the flash drive and select the desired backup file.

► Choose Start.

15 Calibration

15.5 SWS data backup and restore

410 Service Manual SIPLACE Wafer System (SWS) 11/2018