00195982-03_SM_SWS_EN.pdf - 第255页
11 Extension groups 11.1 Wafer supports Service Manual SIPLACE Wafer System (SWS) 11/2018 255 11 Extension groups 11.1 Wafer supports The spare parts apply for the following wafer supports: ● Wafer support 8" SWS12 …
10 Option Die Attach Unit SWS
10.2 Dissambling Die-Attach-Unit SWS
254 Service Manual SIPLACE Wafer System (SWS) 11/2018
11 Extension groups
11.1 Wafer supports
Service Manual SIPLACE Wafer System (SWS) 11/2018 255
11 Extension groups
11.1 Wafer supports
The spare parts apply for the following wafer supports:
●
Wafer support 8" SWS12 (1/3) [00387217-xx]
●
Wafer support 12" SWS12 (1/3) [00387020-xx]
●
Wafer support 8" SWS12 (2/4) [00387411-xx]
●
Wafer support 12" SWS12 (2/4) [00387412-xx]
11.1.1 Overview
Fig.348: Wafer support with wafer inserted (example for 12")
1. Wafer support
2. Wafer
11 Extension groups
11.1 Wafer supports
256 Service Manual SIPLACE Wafer System (SWS) 11/2018
11.1.2 Overview of spare parts
Fig.349: Spare parts on the wafer support (example for 12")
Item Item no. Designation
1 03066721-xx Solenoid valve CPE10-M1BH-5L-M7
2 00385357-xx Screw-in cylinder EGZ-6-5
3 03066505-xx Diffuse mode sensor
4 00386142-xx AD board 12-pin connector pin strip 55x35mm MS-E543
5 00386209-xx Clamp
6 00386560-xx Driver
7 00386242-xx Swivel cylinder DSM-6-180-P-A-FF
8 03063134-xx Proximity switch SME-10-KL-LED-24