00195982-03_SM_SWS_EN.pdf - 第288页

12 Wafer stretcher 12.4 Removing the wafer stretcher 288 Service Manual SIPLACE Wafer System (SWS) 11/2018 12.4.4 Removal at the wafer changer side Fig.402: ► Push the wafer stretcher to the other side. Pay attention to…

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 287

Fig.400:

► Mark the position of the spindle nut e.g. with a pen (1).

► Hold the spindle nut tight (1) and turn the spindle (2), so that the spindle nut is released from

the drive block of the wafer table.

► Manually push the wafer stretcher away from the spindle nut (3).

ð There should now be a space between the spindle nut and the drive block.

Fig.401:

► Remove the two hexagonal screws (1) with a fork wrench or a ratchet.

ð The drive block is now separate from the wafer table.

12 Wafer stretcher

12.4 Removing the wafer stretcher

288 Service Manual SIPLACE Wafer System (SWS) 11/2018

12.4.4 Removal at the wafer changer side

Fig.402:

► Push the wafer stretcher to the other side.

Pay attention to the die ejector and the wafer changer (gripper).

Fig.403:

► Push the wafer stretcher to the end.

► Remove the six screws fastening the cover plate (1).

► Take off the cover plate.

The following connections need to be unplugged as follows:

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 289

Fig.404:

Fig.405:

► Unplug the X11 connector (1).

► Unplug the compressed air cable (2).

Fig.406:

► Unscrew the ground connection (3).

► Dismantle the power chain (4) → concealed.

► There may be a number of cable ties to open in order to unplug the connections properly.