00195982-03_SM_SWS_EN.pdf - 第68页

5 Basic frame – X/Y unit 5.2 Complete overview 68 Service Manual SIPLACE Wafer System (SWS) 11/2018 5.2.1 Basic frame – design and spare parts [00386774-xx] (example SWS 1/3) This unit is responsible for movement of the …

5 Basic frame – X/Y unit

5.1 Function description

Service Manual SIPLACE Wafer System (SWS) 11/2018 67

5 Basic frame – X/Y unit

This assembly consists of the two individual modules basic frame and X/Y unit.

According to the location there are two different variants that only differ in their mirrored arrange-

ment of the modules.

●

Basic frame SWS12 (1,3) [00386774-xx] and X/Y unit SWS12 (1,3) [00386776-xx]

●

Basic frame SWS12 (2,4) [00385830-xx] and X/Y unit SWS12 (2,4) [00385864-xx]

These assemblies are not defined as spare parts.

5.1 Function description

This complete assembly has a motor unit each for the X and the Y direction. These are servo mo-

tors with an encoder positioning. The drive for the axes is realized via spindles with recirculating

ball bearings. The connection between motor and spindle is realized via elastomer couplings.

The X/Y unit helps to position the wafer over the die ejector or to operate the wafer lift.

5.2 Complete overview

Fig.44: Complete assembly "Base plate – X/Y unit" for an SWS 1/3

5 Basic frame – X/Y unit

5.2 Complete overview

68 Service Manual SIPLACE Wafer System (SWS) 11/2018

5.2.1 Basic frame – design and spare parts [00386774-xx] (example SWS 1/3)

This unit is responsible for movement of the wafer table in the Y direction.

Fig.45:

Item Item no. Designation Comments

1 00385645-xx Brushless cybermotor - Y axis

2 03106447-xx Elastomer coupling without play d6,d10

3 0384600-xx AD-MOT Rev.0 Sub-D board = angled Under the cover

4 Ball screw drive and bearing unit

5 0386343-xx Proximity switch, inductive, PNP/1OE RL2

6 0386343-xx Proximity switch, inductive, PNP/1OE FL2

7 00379046-xx Adapter board wafer table AD-WT Rev.0 Under the cover

8 Cover shield for heating unit (stretcher) --> op-

tion

The spare parts for the

basic frame SWS12 (1/3) [00386774-xx]

and the

basic frame SWS12 (2/4) [00385830-xx]

are identical.

5 Basic frame – X/Y unit

5.2 Complete overview

Service Manual SIPLACE Wafer System (SWS) 11/2018 69

5.2.2 X/Y unit – design and spare parts [00386776-xx] (example SWS 1/3)

This unit is responsible for movement of the wafer table in the X direction.

Fig.46:

Item Item no. Designation Comments

1 00385072-xx Brushless cybermotor - X axis

2 03106447-xx Elastomer coupling without play d6,d10

3 0384600-xx AD-MOT Rev.0 Sub-D board = angled Under the cover

4 Ball screw drive and bearing unit

5 0386343-xx Proximity switch, inductive, PNP/1OE RL2

6 0386343-xx Proximity switch, inductive, PNP/1OE FL2

7 00379046-xx Adapter board wafer table AD-WT Rev.0 Under the cover

8 Cover shield for heating unit (stretcher) --> option

The spare parts for the

X/Y unit SWS12 (1,3) - [00386776-xx]

and the

X/Y unit SWS12 (2,4) - [00385864-xx]

are identical.