00195982-03_SM_SWS_EN.pdf - 第315页
12 Wafer stretcher 12.7 Wafer stretcher - configuration changes Service Manual SIPLACE Wafer System (SWS) 11/2018 315 Fitting the sensors on the mounting bracket (12") Fig.444: Wafer support - sensor 1 1. Mounting …
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
314 Service Manual SIPLACE Wafer System (SWS) 11/2018
Removing the sensors for the 8" lifting ring
The sensors for the 8" wafer support are fastened to the lifting ring. These sensors need to be dis-
mantled in order to refit the 8" lifting ring later on. The two sensors for the 12" wafer support are fit-
ted to the wafer support in the SWS with the help of the brackets provided.
Fig.443: Wafer support - 8" lifting ring removed
► Dismantle the heat shield panels attached over the sensors.
► Remove the two sensors (1) from the mounting brackets of the lifting ring.
► Remove the two sensors and fit them on the two mounting brackets from the 12" retrofit kit.
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
Service Manual SIPLACE Wafer System (SWS) 11/2018 315
Fitting the sensors on the mounting bracket (12")
Fig.444: Wafer support - sensor 1
1. Mounting bracket
2. Sensor fitted on the mounting bracket
Fig.445: Wafer support - sensor 2
1. Mounting bracket
2. Sensor fitted on the mounting bracket
► Fit the two sensors (2) onto the mounting bracket (1) from the 12" retrofit kit.
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
316 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fitting the sensors in the 12" wafer support
Fit the two sensors and the mounting brackets into the wafer support.
Fig.446: Wafer support - fitting the sensors
► Reestablish the electrical connections to the sensors.
► Fit the two sensors and the mounting brackets into the wafer support.