00195982-03_SM_SWS_EN.pdf - 第346页

13 BoxPC, GALIL cards and axis control 13.3 Replacing the servo amplifier for the axes 346 Service Manual SIPLACE Wafer System (SWS) 11/2018 13.3 Replacing the servo amplifier for the axes All axes and motors in the SWS …

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13 BoxPC, GALIL cards and axis control
13.2 GALIL cards in the BoxPC
Service Manual SIPLACE Wafer System (SWS) 11/2018 345
Fig.493:
► Loosen/remove the Phillips screw on the GALIL card which you want to replace.
Fig.494:
► Remove the card.
(The example shows a GALIL card DMC1886 including extension card for the axes AXIS1-4
and AXIS5-8.)
► Fit the new card, following the instructions in the reverse order.
No additional settings or calibrations are required.
13 BoxPC, GALIL cards and axis control
13.3 Replacing the servo amplifier for the axes
346 Service Manual SIPLACE Wafer System (SWS) 11/2018
13.3 Replacing the servo amplifier for the axes
All axes and motors in the SWS are driven by the servo amplifier.
There are two different types of servo amplifier (motor amplifier) which are used:
●
AMP-19540 → for 4 motors
●
AMP-19520 → for 2 motors
Fig.495:
Motor amplifier AMP-19540 (5) for the axes:
●
Wafer table X (6)
●
Wafer table Y (6)
●
Die ejector tool change (6)
●
Die ejector (6)
Motor amplifier AMP-19540 (7) for the axes:
●
Flip rotate (rotate axis flip unit) (8)
●
Flip Z axis pick up (8)
●
Die attach unit rotate (9) → optional
●
Flip X axis/hand over (9) → optional
As the die attach module is an option, older modules only feature one AMP-19520 for two axes.
When retrofitting this options, you need to fit one AMP-19540 for four axes.
In newer modules, the problematic retrofitting of the AMP means that one AMP-19540 for 4 axes
has become the standard.
However, there are still SWS with AMP-19520 for the axes (8) present at some customer sites:
●
Motor amplifier AMP-19520 (10) for the axes:
– Magazine lift (11)
– Wafer handler (gripper) (11)
In this case, one AMP-19520 for two axes is adequate, as this is fitted in the base of the wafer lift
tower and no additional optional axes will be added.
13 BoxPC, GALIL cards and axis control
13.3 Replacing the servo amplifier for the axes
Service Manual SIPLACE Wafer System (SWS) 11/2018 347
13.3.1 Removing the servo amplifier AMP-19540 from the SWS frame
Removal of the AMP-19520 servo amplifier from the wafer lift base is not described separately. The
procedure is the same.
The description shows removal of the AMP-19540 for AXIS1-4. This card is the most difficult to
access.
► Dismantle and remove the SWS from the machine (see 4.1 "Removing the SWS" [}59]).
► Fold the wafer lift out to one side (see 4.3 "Swinging up the magazine lift" [}65]).
Fig.496:
► Remove the two Allen screws on the base plate (where the BoxPC is fitted).
Fig.497:
► Remove the right side panel.