00195982-03_SM_SWS_EN.pdf - 第217页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS Service Manual SIPLACE Wafer System (SWS) 11/2018 217 Fig.281: Item Designation 1 Connecting assembly on board 00379104-xx for Motor M7/Rotate…

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10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
216 Service Manual SIPLACE Wafer System (SWS) 11/2018
10.1.2 Initial situation
Fig.280:
Item Item no. Designation
1 00386236-xx Cable motor current MOT-1 for Rotate Die Attach Connector 2x2
2 00386234-xx Cable signals ENCH1 for Rotate Die Attach Connector RS232
3 00386235-xx Cable signals ENCH2 for Flip Tool X Connector RS232
4 00386237-xx Cable motor current MOT-2 for Flip Tool X Connector 2x2
5 00386918-xx Cable → NOT USED
6 00386020-xx Cable Control IN/OUT at ST1-12 Connector 2x6
7 Connection hose vacuum
8 Grounding cable for Die Attach Unit SWS
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 217
Fig.281:
Item Designation
1 Connecting assembly on board 00379104-xx for Motor M7/Rotate Die Attach
2 Connector ENCH1 for signals Motor Rotate Die Attach to Galil board
3 Connector MOT-1 voltage supply Motor Rotate Die Attach to Galil board
4 Connecting assembly on board 00379104-xx for Motor M8/Flip Tool X to Galil board
5 Connector ENCH2 for signals Motor Flip Tool X to Galil board
6 Connector MOT-2 for voltage supply Motor Flip Tool X to Galil board
7 Connecting assembly on board 00385749-xx for sensors
8 Connector ST1 for sensors to board USB-IO
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
218 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.282:
Item Designation
1 Pre-wired module assembly Die Attach Unit SWS
2 Voltage supply Motor Rotate Die Attach cable 00386236-xx at Connector MOT-1
3 Cable Signals Motor Rotate Die Attach 00386234-xx at Connector ENCH1
4 Cable Power Supply Motor Flip-Tool-X 00386237-xx at Connector MOT-2
5 Cable Signals Motor Flip-Tool-X 00386235-xx at Connector ENCH2
Fig.283:
Item Designation
1 Pre-wired module assembly Die Attach Unit SWS
2 Cable Die Attach Unit Control IO/OUT 00386020-xx at ST1-12