00195982-03_SM_SWS_EN.pdf - 第176页
8 Flip unit 8.2 Overview of spare parts 176 Service Manual SIPLACE Wafer System (SWS) 11/2018 Flip unit - wafer camera Fig.229: Flip unit - wafer camera Flip unit - fuse on the USB I/O flip unit board Fig.230: Flip uni…
8 Flip unit
8.2 Overview of spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 175
Return unit
Fig.227: Return unit
Flip unit - base plate
Fig.228: Base plate - flip unit
NOTICE
The reset button on the USB-IO-Rev.2 board (11) may not be used (firmware version).
8 Flip unit
8.2 Overview of spare parts
176 Service Manual SIPLACE Wafer System (SWS) 11/2018
Flip unit - wafer camera
Fig.229: Flip unit - wafer camera
Flip unit - fuse on the USB I/O flip unit board
Fig.230: Flip unit - fuse on the USB I/O flip unit board
8 Flip unit
8.2 Overview of spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 177
Spare parts on the flip unit
Item Item no. Designation
1 03122422-xx Flip head assembly, adjustable
2 00384731-xx Return unit assembly
3 03099183-xx Z drive C&P20 CA
4 00385451-xx RPC flex cable jumper 5 pin, length = 2.2"
5 00385278-xx Proximity switch inductive, NBB1-4GM22-E2
6 00384898-xx Proximity switch inductive for querying the reject bin
7 00387541-xx Solenoid valve assembly
8 00385560-xx Plug socket cable KMH-0.5
9 00385465-xx Valve terminal MH1-2 valves
10 03068603-xx Solenoid valve
11 00385498-xx Board USB-IO Rev.2 150x65mm
12 00385537-xx Adapter board AD-MOT2-F for flip unit
00387223-xx Soft polyurethane hose 4x2.5
03068603-xx Solenoid valve MHE2
13 00386499-xx Camera standard SWS (flip unit wafer camera)
14 03078645-xx Fuse 3 AT (on the USB I/O flip chip board)
15 03037984-xx Suction plate assembly DLM / R light beige
03083027-xx Spacer disk DIN 988-3x6x0.3-1.4310