00195982-03_SM_SWS_EN.pdf - 第240页
10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS 240 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.320: ► Remove the calibration tool from the Die Attach drive. Remove the fastening s…
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 239
Fig.318:
► Next, the window Calibration of die attach axes displays information on what the calibration
wizard will do in this specific step and what the operator has to do.
In Step 1 there is nothing to do for the operator.
► Choose Next.
Fig.319:
► Step 2 is performed automatically.
Perform the following steps as instructed on the screen:
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
240 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.320:
► Remove the calibration tool from the Die Attach drive. Remove the fastening screw for this
(see figure).
Fig.321:
► Remove the nozzle from the Die Attach segment and turn the segment in the upper transfer
position. Fit the gauge (see figure).
► Choose Next.
ð After successful calibration, the window with Step 3 is displayed.
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 241
Fig.322:
Fig.323:
► Mount the gauge back at its the original position.
► Choose Next.
ð The following window with Step 4 is displayed.