00195982-03_SM_SWS_EN.pdf - 第227页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS Service Manual SIPLACE Wafer System (SWS) 11/2018 227 Fig.298: ► Insert the long Die Attach reject bin as shown in the figure. Fig.299: ► Con…

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

226 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.296:

► Rotate vacuum valve Y6 back into its position, insert the safety screws and tighten them.

Fig.297:

► Loosen the screw shown in the figure, run the grounding cable beneath it and tighten the

screw again.

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 227

Fig.298:

► Insert the long Die Attach reject bin as shown in the figure.

Fig.299:

► Connect the black vacuum tube to valve Y6 (valve Y6 switches the vacuum for the Die Attach

segment).

10 Option Die Attach Unit SWS

10.1 Installing the Option Die Attach Unit SWS

228 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.300:

► If the black vacuum tube that is stored in the SWS is too long, cut it according to the figure

below. Keep in mind that the tube must be long enough to be routed in such a way that the

cover of the Die Attach Unit can be mounted later on.

Fig.301:

► Connect the blue tube that is connected to valve Y8 (air pressure control for the Die Attach

segment air kiss) to the upper connection and the grey tube (5bar for transfer X motor re-

lease) to the lower air connection.

ð If the nozzle on the Die Attach segment “flies away later”, you have swapped the tubes

(5bar air kiss).

► If the blue and the grey cable delivered with the Die Attach Unit are too long, cut these ac-

cording to the figure. Keep in mind that the tube must be long enough to be routed in such a

way that the cover of the Die Attach Unit can be mounted later.