00195982-03_SM_SWS_EN.pdf - 第105页
5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 105 5.3.6 Replacing the Y axis motor board This motor board supplies the Y motor with voltages and receives the signals from …
5 Basic frame – X/Y unit
5.3 Replacing parts
104 Service Manual SIPLACE Wafer System (SWS) 11/2018
Removal using the example of H01
Removal for HO2 is identical.
For information about wiring, see section 5.2.3 "Overview of sensors" [}70].
Fig.109:
► Remove the two screws (2) fastening the fork light barrier HO1 (1).
► Unthread the connection cable as far as the wafer table adapter board.
► Use the circuit diagram folder for help and mark the cables connected, if not already marked.
► Unplug all connections from the terminal strip.
► Fit the new fork light barrier
► Run the connection cable as far as the wafer table adapter board.
► Connect the connection cable to the relevant terminal strip.
► Fix and gather the cables together with cable ties, where necessary. Make sure that the
cables do not rub against any part or get trapped.
5 Basic frame – X/Y unit
5.3 Replacing parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 105
5.3.6 Replacing the Y axis motor board
This motor board supplies the Y motor with voltages and receives the signals from the encoder.
For information about wiring, see section 5.3.1 "Replacing the Y motor with coupling" [}73].
Fig.110:
► Remove the cover from the motor board.
► Use the circuit diagram folder for help and mark the cables connected, if not already marked
(see 5.3.1 "Replacing the Y motor with coupling" [}73]).
► Unplug the electrical connections and cable.
► Remove the three fastening screws and then remove the motor board.
► Fit the new motor board.
► Reconnect to the electricity supply.
► Fix and gather the cables together with cable ties, where necessary. Make sure that the
cables do not rub against any part or get trapped.
► Fit the cover on the motor board.
5 Basic frame – X/Y unit
5.3 Replacing parts
106 Service Manual SIPLACE Wafer System (SWS) 11/2018
5.3.7 Replacing the X axis motor board
This motor board supplies the X motor with voltages and receives the signals from the encoder.
For information about wiring, see section 5.3.1 "Replacing the Y motor with coupling" [}73].
Fig.111: Motor board using the example SWS 1/3.
► Use the circuit diagram folder for help and mark the cables connected, if not already marked.
► Unplug the electrical connections and cable.
► Remove the fastening screws and then remove the motor board(1).
► Fit the new motor board.
► Reconnect to the electricity supply.
► Fix and gather the cables together with cable ties, where necessary. Make sure that the
cables do not rub against any part or get trapped.
5.3.8 Microfuse F1 on adapter board for wafer table AD-WT Rev.0 [00379046-xx]
Fig.112: Microfuse F1
If the message "Unable to load USB-IO
firmware" appears, this could indicate that the
microfuse F1 is defective.