00195982-03_SM_SWS_EN.pdf - 第318页

12 Wafer stretcher 12.7 Wafer stretcher - configuration changes 318 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fitting the lifting ring Fig.449: Wafer support - fitting the lifting ring ► Insert the lifting ring …

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12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
Service Manual SIPLACE Wafer System (SWS) 11/2018 317
Fitting the block to the clamp
Fig.447: Wafer support - fitting the clamping block
► Fit the block (2) from the 12" retrofit kit onto the clamp (1).
Fitting the cover plate (for 12" wafer support only)
Fig.448: Wafer support - fitting the cover plate
► Use the four screws to fit the cover plate (1) to the wafer support.
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
318 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fitting the lifting ring
Fig.449: Wafer support - fitting the lifting ring
► Insert the lifting ring (1).
► Insert the four springs (3) into the four holes.
► Position the four fixing disks (2) on these.
► Fasten the fixing disks with the fastening screws (4).
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
Service Manual SIPLACE Wafer System (SWS) 11/2018 319
Fitting the downholder plates
Fig.450: Wafer support - removing the downholder plate
► Use the auxiliary tool (2) to align the lifting piston, so that the openings point outwards.
► Place the downholder plates form the 12" retrofit kit onto the wafer support.
► Place the conical fixing disks (3) into the holes provided.
► Loosely tighten the downholder plates with the screws.
► Insert the auxiliary tool (4) into the opening and fix the lifting piston inside with it.
► Tighten the four screws (1) on each of the two downholder plates(5), one after the other.
12.7.3.4 Difference when converting the 12" to the 8"
The sensors need to be removed from the wafer support and fitted to the 8" expansion plates (see
12.7.3.3.3 "Removing the lifting ring for the 8" wafer stretcher" [}313]).
The block needs to be removed from the clamp and hooked up in place of the clamping lever (see
12.7.3.3.2 "Releasing the clamp" [}312]).