00195982-03_SM_SWS_EN.pdf - 第490页
18 Appendix 18.4 Control system IN/OUT 490 Service Manual SIPLACE Wafer System (SWS) 11/2018 18.4 Control system IN/OUT 18.4.1 Control boards input/output DMC1886(1866) Galil motion controller (PCI bus) with integrated I…
18 Appendix
18.3 Specification: motor control
Service Manual SIPLACE Wafer System (SWS) 11/2018 489
18.3.6.5 Initialization run for flip X (handover) MOT8 (H)
The flip Z linear motor will be held in its switched off state, clamped in the park position by the
clamping cylinder.
The flip X motor will be supplied with power, then the clamping cylinder (set OUT 14 on) will open.
The home signal will then be switched "H8" (signal = 24 V), issuing the release for initialization.
The linear motor searches for the index track, positioned approx. 0.5 mm under the top mechanical
stop, in a diagonal upwards direction.
Once the index track has been found, the counter for the MOT8(H) axis will be updated and the
motor will move to the saved park position.
During emergency STOP function
If the emergency STOP is pressed, the motor will then be current-free and the clamping cylinder
will be switched off at the same time via K2 (signal OUT14 will be interrupted).
The spring-loaded clamping cylinder will close and the flip X motor will be held in the set park position.
18.3.6.6 Initialization sequence for die attach unit MOT7(G)
The die attach rotor (360° movement in a circle) will then be switched on and will search for the
home sensor "HO7".
The home sensor sits at the right side rotor position. The encoder index track will then be searched
for in a clockwise direction.
Once the index track has been found, the counter for the MOT7(G) axis will be updated and the
motor will move to the saved transfer position.
18.3.6.7 Initialization run for wafer magazine lift MOT9 (A)
The magazine lift axis has a lifting distance of 370mm and is limited by the limit sensors
"RL9" (bottom) and "FL9" (top).
An attached motor brake clamps the wafer magazine lift into place.
Safety door switch
The initialization can only be run with closed wafer lift door.
An open safety door switch interrupts the "FL9" and "RL9" signals so that the motor can not be
moved via the control system.
At the same time, the opened safety door switch will be used to switch on the motor brake (magnet
control 24 V = interrupted) and switch off the control signal "IN1.3".
Initialization
By switching on the motor current, the "AEN1" signal also simultaneously switches off the motor
brake (braking magnet is on) via a power-optocoupler "OK1".
The initialization of the motor is upwards, towards the "FL9" sensor. The encoder index track will
then be searched for in a downwards direction.
Once the index track has been found, the counter for the MOT9(A) axis will be updated and the
magazine lift will then move to the starting position.
Emergency STOP function
If the emergency STOP is pressed, the motor will then be currentless and the motor brake will be
switched on via K2 (connection GND braking magnet is interrupted).
18.3.6.8 Initialization run for wafer handler MOT10 (B)
The wafer handler axis has a lifting distance of 460mm (CSM8) or 510mm (CSM12) and is limited
by the limit sensors "RL10" (magazine end) and "FL10" (flip end). The initialization of the motor is
towards the back and the "FL10" sensor. The encoder index track is then searched for in a for-
wards direction.
Once the index track has been found, the counter for the MOT10(B) axis will be updated and the
wafer handler will then move to the back starting position.
18 Appendix
18.4 Control system IN/OUT
490 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.4 Control system IN/OUT
18.4.1 Control boards input/output
DMC1886(1866) Galil motion controller (PCI bus) with integrated I/O system
Connections via 2x 100 pin connector:
●
16x digital input, optoisolation, 24V/PNP,
●
8x digital input 5V/NPN,
●
8x analog input +/-10V, (not used)
●
16x digital output, optoisolation 24V/500mA, p-switching
DMC1826 Galil motion controller (PCI bus) with integrated I/O system
Connections via 1x 100 pin connector for:
●
8x digital input, optoisolation, 24V/PNP,
●
8x analog input +/-10V, (not used)
●
8x digital output, optoisolation 24V/500mA, p-switching
Distributor I/O board DMC-INT1 (145 x 72mm), installation point: wafer lift
Connection terminals for:
●
8x digital input 24VPNP with red LED display.
●
8x digital output 24V / max2A / p-switching with yellow LED display.
●
12x digital input 24V/PNP, = limit and home sensors for 4 motors, with LED.
●
4x terminal MCMx (motor command), 4x terminal AENx (amplify enable) with LED.
●
1x ABORT (cancel), 1x ECC (encoder common), 1x INC (input common).
●
1x LSC (limit common), 8x analog input +/-10V, 4x terminals for analog GND.
●
16x terminal (gray) GND, 12x terminal (orange) 24V, with fuse F1/4AT.
●
Terminals (orange) 2x 5V, 1x +12V, 1x -12V, from PC.
Distributor I/O board DMC-INT2 (230 x 145mm) installation point: electrical unit
Connection terminals for:
●
24x digital input 24V/PNP with red LED display.
●
16x digital output / 24V / max2A / p-switching / with yellow LED display.
●
24x digital input 24V/PNP, limit and home sensors for 8 motors, with red LED.
●
8x terminal MCMx (motor command), 8x terminal AENx (amplify enable) with LED.
●
2x ABORT (cancel), 2x ECC (encoder common), 2x INC (input common).
●
2x LSC (limit common), 8x analog input +/-10V, 4x terminals for analog GND.
●
40x terminal (blue) GND, 24x terminal 24V (orange), with fuse F1/4AT.
●
Terminals (orange) 2x 5V (via F2/1AT), 2x +12V, 2x -12V, from PC.
18 Appendix
18.4 Control system IN/OUT
Service Manual SIPLACE Wafer System (SWS) 11/2018 491
Adapter board AD-WT Rev.0 (229 x 65 mm), installation location: table plate for
wafer table
Connections for:
●
21x feed-through terminals for in/outputs
●
12x feed-through terminals for home and limit sensors, (for servo motor 1-4)
●
15x terminals (orange) 24V, secured via F1/2AT, control LED1 green.
●
15x terminals (gray) GND.
●
1x fuse for 5V logic voltage, F2/0.5AF, control LED2 green.
●
Integrated logic control for the wafer table limit cutoff, which protects the die ejector, with
jumper J1/2/3/4/5 for logic setting.
●
2x stepping motor control for X/Y axis die ejector, = option.
●
1x feed-through terminals for a servo motor, Hall sensors and encoder
18.4.2 Structure of DMC-18x6 I/O system
The complete input/output system is integrated into the Galil motion controllers 1x "DMC1886" or
"DMC1866" and "DMC1826".
The signal line is run via 3 100 pin cables, from the Galil DMC18x6 and is looped through via three
"AMP-19540"(19520") amplifiers.
At the amplifier, the signals are transmitted via the "AUX-IO J3x" (44 pin) connector to the "DMC-
INT2" or "DMC-INT1" board.
The analog input and the digital input 5V are each transmitted via the 15 pin "analog 1" connector
to the amplifier on the "DMC-INT2" board.
At the "DMC-INT1(2)" boards, the signals are picked off from the terminal connections and either
directly distributed in the machine or distributed via the connection cable with sub-D connector.
The inputs on the "DMC18x6" can be operated either with NPN or PNP.
The joint "INCOM" connection for the inputs to the "DMC18x6" is run via the "DMC-INT1(2)" adap-
ter board with jumper "J2(J4)" to COM24, so that the inputs use PNP logic.
Label DMC1886(66) Input 1 to 24 = IN1, IN2,…IN24
Analog input 1 to 8 = ANA1, ANA2,…ANA3
Output 1 to 16 = OUT1, OUT2,…OUT16
Label DMC1826 Input 1 to 8 = IN1.1, IN1.2,…IN1.8
Output 1 to 8 = OUT1.1, OUT1.2,…OUT1.8
Label USB-IO Input-1 to 8 = DI1, DI2,…DI8
Analog input 1 to 8 = AI1, AI2,…AI3
Output-1 to 8 = DO1, DO2,…DO8
Current output (current control) 1 to 8 = ILED1, ILED2,…ILED8