00195982-03_SM_SWS_EN.pdf - 第396页

15 Calibration 15.4 Calibration of the complete wafer handling 396 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.576: (1) Wafer table rail (2) Magazine plate (3) Metal ruler ► Place a metal ruler (3) on the guid…

15 Calibration

15.4 Calibration of the complete wafer handling

Service Manual SIPLACE Wafer System (SWS) 11/2018 395

Fig.574:

► Move the wafer table manually to a position, where one rail has a direct transfer position to

the magazine plate.

Fig.575:

► Search for a free area without stopper plates.

15 Calibration

15.4 Calibration of the complete wafer handling

396 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.576:

(1) Wafer table rail

(2) Magazine plate

(3) Metal ruler

► Place a metal ruler (3) on the guide rail.

Fig.577:

► Use the manipulator and move the wafer lift slowly until they are on the same level.

WARNING

Mind the moving lifting axis!

► Never put your fingers into the lift area.

► Always use a metal ruler!

► Use small steps (e.g. 100µm or 500µm) to adjust the wafer transfer position.

► Choose Save next to Wafer transfer position to save the position.

15 Calibration

15.4 Calibration of the complete wafer handling

Service Manual SIPLACE Wafer System (SWS) 11/2018 397

15.4.1.4 Calibrating the wafer lift position – magazine change position

Fig.578:

► (1) Choose the Go to position button next to Magazine change position to move the lifting

axis into this position.

► (2) The plastic rail on the magazine plate and the one on the lift frame should now be on the

same level (see figure below).

Fig.579:

► (3) If not, correct the position with the up and down arrow keys after choosing the appropriate

step size.